Electrochemical micromachining as an enabling technology for advanced silicon microstructuring

Advanced Functional Materials

Volumn 22, Issue 6, 2012, Pages 1222-1228

  Bassu, Margherita ^a   Surdo, Salvatore ^a   Strambini, Lucanos Marsilio ^a   Barillaro, Giuseppe ^a  

^a UNIVERSITY OF PISA   (Italy)

Author keywords

electrochemical etching; micro electromechanical systems (MEMS); microgrippers; microstructures; microsystems; silicon micromachining

Indexed keywords

AQUEOUS ELECTROLYTE; DYNAMIC CONTROLS; ELECTROCHEMICAL MICRO-MACHINING; ENABLING TECHNOLOGIES; ETCHING ANISOTROPY; HIGH ASPECT RATIO; HIGH FLEXIBILITY; LOW COSTS; LOW-COST TECHNOLOGY; MICRO STRUCTURING; MICROGRIPPERS; MICROSYSTEM FABRICATION; SILICON DISSOLUTION; SILICON MICROMACHINING; SILICON MICROSTRUCTURES; SILICON MICROSYSTEM; SUBMICROMETERS;

ANISOTROPY; ASPECT RATIO; COMPOSITE MICROMECHANICS; ELECTROCHEMICAL ETCHING; MEMS; MICROELECTRONICS; MICROMACHINING; MICROSTRUCTURE; WET ETCHING;

MICROSYSTEMS;

EID: 84858436198     PISSN: 1616301X     EISSN: 16163028     Source Type: Journal    
DOI: 10.1002/adfm.201102124     Document Type: Article

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