Silicon micromachined periodic structures for optical applications at λ=1.55 μm

Applied Physics Letters

Volumn 89, Issue 15, 2006, Pages

  Barillaro, G ^a   Diligenti, A ^a   Benedetti, M ^b   Merlo, S ^b  

^a UNIVERSITY OF PISA   (Italy)

^b UNIVERSITY OF PAVIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL ETCHING; PERIODIC STRUCTURES; PHOTONIC CRYSTAL; SILICON WALLS;

CRYSTAL STRUCTURE; ETCHING; MICROSTRUCTURE; OPTICAL DESIGN; PHOTONS; SILICON;

MICROMACHINING;

EID: 33749996034     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358323     Document Type: Article

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