Low energy ion beam smoothening of artificially synthesized single crystal diamond chips with initial surface roughness of 0.08-0.4 nm rms

Diamond and Related Materials

Volumn 24, Issue , 2012, Pages 116-120

  Mahmud, S F ^a   Fukabori, T ^a   Pahlovy, S A ^a   Miyamoto, I ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Ion beam smoothing; Single crystal diamond; Surface roughness; Surface waviness

Indexed keywords

CHIP SURFACES; DIAMOND MATERIALS; DIAMOND POWDERS; DIAMOND SURFACES; HIGH QUALITY; ION BEAM MACHINING; ION BEAM SMOOTHING; LOW ENERGY ION BEAM; MECHANICAL PROCESS; NANO IMPRINT; NORMAL INCIDENCE; POWER SPECTRAL DENSITIES (PSD); PROCESSING RATES; PROFILE ANALYSIS; ROUGH SURFACES; ROUGHNESS LEVEL; SINGLE CRYSTAL DIAMOND; SMOOTH SURFACE; SURFACE WAVINESS; ULTRA SMOOTH SURFACE; X-RAY FREE ELECTRON LASERS;

ION BEAMS; POWER SPECTRAL DENSITY; SINGLE CRYSTALS; SURFACE ROUGHNESS; SURFACES;

SYNTHETIC DIAMONDS;

EID: 84858342838     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.12.028     Document Type: Article

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