Fine Finishing of Diamond Tools with Broad Ion Beams

New Diamond and Frontier Carbon Technology

Volumn 10, Issue 2, 2000, Pages 63-77

  Miyamoto, Iwao ^a   Taniguchi, Jun ^a   Kiyohara, Shyuji ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Diamond; Diamond tools; Fine pattern; Ion beam machining; Sputtering

Indexed keywords

EID: 0346106416     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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