Ion beam fabrication of natural single crystal diamond nano-tips for potential use in atomic force microscopy

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1494-1496

  Nagase, Takashi ^a   Kawamura, Junki ^a   Pahlovy, Shahjada Ahemed ^a   Miyamoto, Iwao ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

AFM; Diamond probe; Ion beam; Sharpening; Smoothing

Indexed keywords

AFM; APEX ANGLES; ATOMIC FORCE MICROSCOPES; DIAMOND TIP; HIGH RESISTANCE; METALLOGRAPHIC ETCHING; NI FILMS; SINGLE CRYSTAL DIAMOND;

ATOMIC FORCE MICROSCOPY; HARDNESS; ION BEAMS; IONS; NANOTIPS; PROBES; SINGLE CRYSTALS; WEAR RESISTANCE; XENON;

DIAMONDS;

EID: 76949104403     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.070     Document Type: Article

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