Ion beam sharpening of diamond tools having small apex angle without facet and ripple formations

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2686-2690

  Nagase, Takashi ^a   Kato, Hiroyuki ^a   Pahlovy, S A ^a   Miyamoto, Iwao ^a   Nakamura, Yuya ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APEX ANGLES; CUTTING EDGES; DIAMOND TOOL; FACET FORMATION; ION BEAM BOMBARDMENT; ION BEAM ENERGY; ION BEAM MACHINING; ION DOSE; ION INCIDENCE ANGLE; LOW ENERGIES; OFF-NORMAL ANGLE; RIPPLE FORMATION; SIMULATION RESULT; TILT ANGLE;

BEAM PLASMA INTERACTIONS; CUTTING MACHINES (MINING); CUTTING TOOLS; DIAMOND CUTTING TOOLS; DIAMONDS; ION BEAMS; IONS;

ION BOMBARDMENT;

EID: 72849119876     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3246404     Document Type: Conference Paper

References (20)

1. I. Miyamoto, Precis. Eng. 9, 71 (1987).
2. I. Miyamoto and N. Taniguchi, Precis. Eng. 4, 191 (1982).
3. I. Miyamoto and N. Taniguchi, Precis. Eng. 5, 61 (1983).
4. I. Miyamoto, J. Taniguchi, and S. Kiyohara, New Diamond Front. Carbon Technol. 10, 63 (2000).
5. W. L. Chan and E. Chason, J. Appl. Phys. 101, 121301 (2007).
6. F. Frost, B. Ziberi, T. Höche, and B. Rauschenbach, Nucl. Instrum. Methods Phys. Res. B 216, 9 (2004).
7. T. K. Chini, M. K. Sanyal, and S. R. Bhattacharyya, Phys. Rev. B 66, 153404 (2002).
8. D. P. Datta and T. K. Chini, Phys. Rev. B 71, 235308 (2005).
9. A. Datta, Yuh-Renn Wu, and Y. L. Wang, Phys. Rev. B 63, 125407 (2001).
10. Y. Kurashima, R. Uozumi, I. Miyamoto, M. Ando, and A. Numata, J. Vac. Sci. Technol. B 25, 2104 (2007).
11. Y. Kurashima, S. Miyachi, I. Miyamoto, M. Ando, and A. Numata, Microelectron. Eng. 85, 1193 (2008).
12. A. D. G. Stewart and M. W. Thompson, J. Mater. Sci. 4, 56 (1969).
13. G. Carter, J. S. Colligon, and M. J. Nobes, J. Mater. Sci. 6, 115 (1971).
14. C. Catana, J. S. Colligon, and G. Carter, J. Mater. Sci. 7, 467 (1972).
15. R. Smith and J. M. Walls, Philos. Mag. A 0141-8610 42, 235 (1980).
16. J. P. Ducommun, M. Cantagrel, and M. Marchal, J. Mater. Sci. 9, 725 (1974).
17. M. J. Witcomb, J. Mater. Sci. 9, 551 (1974)
18. M. J. Witcomb, J. Mater. Sci. 9, 1227 (1974)
19. M. J. Witcomb, J. Mater. Sci. 10, 669 (1975)
20. M. J. Witcomb, J. Appl. Phys. 46, 5053 (1975)