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Vacuum

Volumn 86, Issue 8, 2012, Pages 1107-1112

Approximation of crystallite size and microstrain via XRD line broadening analysis in TiSiN thin films

(4) Bushroa, A R a Rahbari, R G a Masjuki, H H a Muhamad, M R a

a UNIVERSITY OF MALAYA (Malaysia)

Author keywords

Approximation method; Size strain analysis; Thin films; TiSiN; XRD

Indexed keywords

ADHESION MEASUREMENT; APPROXIMATION METHODS; HIGH SPEED STEEL SUBSTRATE; LINE BROADENING; LINE-BROADENING ANALYSIS; MICRO-STRAIN; MICROSTRUCTURE OBSERVATION; SCANNING ELECTRON MICROSCOPES; SIZE-STRAIN ANALYSIS; TISIN; XRD;

ADHESION; APPROXIMATION THEORY; RELIABILITY ANALYSIS; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

CRYSTALLITE SIZE;

EID: 84858156157 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2011.10.011 Document Type: Article

Times cited : (168)

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