Elaboration and characterization of sol-gel derived ZrO 2 thin films treated with hot water

Applied Surface Science

Volumn 258, Issue 13, 2012, Pages 5250-5258

  Soo, Mun Teng ^a,b   Prastomo, Niki ^b,c   Matsuda, Atsunori ^b   Kawamura, Go ^b   Muto, Hiroyuki ^b   Noor, Ahmad Fauzi Mohd ^a   Lockman, Zainovia ^a   Cheong, Kuan Yew ^a  

^a SCHOOL OF MATERIALS AND MINERAL RESOURCES ENGINEERING   (Malaysia)

^b TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^c Surya College of Education STKIP Surya   (Indonesia)

Author keywords

Ethanol solvent; Refractive index; Sol gel; Thickness; Thin film

Indexed keywords

ACETONE; ANNEALING; CHELATION; CHROMIUM COMPOUNDS; CRYSTALLITE SIZE; ETHANOL; FILM THICKNESS; ORGANIC SOLVENTS; REFRACTIVE INDEX; SOL-GEL PROCESS; SOL-GELS; THIN FILMS; WATER; WATER TREATMENT; ZIRCONIA;

ANNEALING TEMPERATURES; CRYSTALLINITIES; HOT WATER TREATMENT; SPIN-COATING METHOD; TETRAGONAL PHASE; TETRAGONAL ZRO2; THICKNESS; ZRO2 THIN FILMS;

FILM PREPARATION;

EID: 84858073708     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.02.008     Document Type: Article

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