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Volumn 68, Issue , 2012, Pages 24-33

Spatial emission distribution of a pulsed radiofrequency glow discharge: Influence of the pulse frequency

Author keywords

Optical emission; Pulsed radiofrequency GD; Spatial resolution

Indexed keywords

ANALYTES; ARGON ATOMS; ARGON ION; COPPER ATOMS; DUTY CYCLES; EMISSION LINES; EMISSION SIGNAL; EMITTED RADIATION; GAS SPECIES; INTERMEDIATE FREQUENCIES; IONIC EMISSION; IONIC SPECIES; LOWER FREQUENCIES; OPTICAL EMISSIONS; PLASMA PLUMES; PULSE FREQUENCIES; PULSEWIDTHS; RADIO FREQUENCIES; RADIOFREQUENCY GLOW DISCHARGES; SPATIAL EMISSION; SPATIAL RESOLUTION;

EID: 84858073405     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2012.01.008     Document Type: Article
Times cited : (7)

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