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Volumn 26, Issue 4, 2011, Pages 776-783

Analytical performance of pulsed radiofrequency glow discharge optical emission spectrometry for bulk and in-depth profile analysis of conductors and insulators

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL PERFORMANCE; BULK MATERIALS; COATED GLASS; COATED SAMPLE; CONDUCTING MATERIALS; CONTINUOUS MODE; DEPTH-PROFILING ANALYSIS; DUTY CYCLES; EMISSION YIELDS; EXPERIMENTAL CONDITIONS; GOLD LAYER; IN-DEPTH PROFILE; INSULATING SUBSTRATES; MULTI-LAYERED; OPTICAL EMISSION SPECTROMETRY; PULSE FREQUENCIES; PULSE WIDTH; PULSED MODE; RADIOFREQUENCY GLOW DISCHARGES; RF-GD-OES; SPUTTERING RATE; SYSTEMATIC STUDY;

EID: 79952312219     PISSN: 02679477     EISSN: 13645544     Source Type: Journal    
DOI: 10.1039/c0ja00094a     Document Type: Conference Paper
Times cited : (12)

References (29)
  • 29
    • 79953062049 scopus 로고    scopus 로고
    • www.gladnet.eu


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.