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Volumn 26, Issue 4, 2011, Pages 776-783
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Analytical performance of pulsed radiofrequency glow discharge optical emission spectrometry for bulk and in-depth profile analysis of conductors and insulators
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Author keywords
[No Author keywords available]
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Indexed keywords
ANALYTICAL PERFORMANCE;
BULK MATERIALS;
COATED GLASS;
COATED SAMPLE;
CONDUCTING MATERIALS;
CONTINUOUS MODE;
DEPTH-PROFILING ANALYSIS;
DUTY CYCLES;
EMISSION YIELDS;
EXPERIMENTAL CONDITIONS;
GOLD LAYER;
IN-DEPTH PROFILE;
INSULATING SUBSTRATES;
MULTI-LAYERED;
OPTICAL EMISSION SPECTROMETRY;
PULSE FREQUENCIES;
PULSE WIDTH;
PULSED MODE;
RADIOFREQUENCY GLOW DISCHARGES;
RF-GD-OES;
SPUTTERING RATE;
SYSTEMATIC STUDY;
COATED MATERIALS;
GLASS;
GLOW DISCHARGES;
GOLD COATINGS;
LIGHT EMISSION;
OPTICAL EMISSION SPECTROSCOPY;
SPECTROMETRY;
TIN;
DEPTH PROFILING;
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EID: 79952312219
PISSN: 02679477
EISSN: 13645544
Source Type: Journal
DOI: 10.1039/c0ja00094a Document Type: Conference Paper |
Times cited : (12)
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References (29)
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