Langmuir probe study of the charged particle characteristics in an analytical radio frequency-glow discharge. Roles of discharge conditions and sample conductivity

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 51, Issue 5 PART B, 1996, Pages 509-531

  Ye, Yuancai ^a   Marcus, R Kenneth ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

Conductive sample; Electron density; Langmuir probe; Radio frequency glow discharge

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRON ENERGY LEVELS; ELECTRONIC DENSITY OF STATES; EMISSION SPECTROSCOPY; GLOW DISCHARGES; IONS; PLASMAS; SPUTTERING;

ELECTRON ENERGY DISTRIBUTION FUNCTION; ION NUMBER DENSITY; LANGMUIR PROBE STUDY; RADIOFREQUENCY POWERED GLOW DISCHARGE;

CHARGED PARTICLES;

EID: 0030124272     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/0584-8547(95)01433-0     Document Type: Article

References (46)

1. R.K. Marcus, T.R. Harville, Y. Mei and C.R. Shick, Jr., Anal. Chem., 66 (1994) 902A.
2. R.K. Marcus, J. Anal. At. Spectrom., 9 (1994) 1029.
3. R.K. Marcus (Ed.) Glow Discharge Spectroscopies, Plenum Press, New York, 1993.
4. R.K. Marcus, J. Anal. At. Spectrom., 8 (1993) 935.
5. C. Lazik and R.K. Marcus, Spectrochim. Acta Part B, 48 (1993) 863.
6. M. Parker and R.K. Marcus, Appl. Spectrosc., 48 (1994) 623.
7. T.R. Harville and R.K. Marcus, Anal. Chem., 65 (1993) 3636.
8. M.R. Winchester and R.K. Marcus, Anal. Chem., 64 (1992) 2067.
9. D.C. Duckworth and R.K. Marcus, Anal. Chem., 61 (1989) 1879.
10. C. Lazik and R.K Marcus, Spectrochim. Acta Part B, 48 (1993) 1673.
11. N. Bordel-Garcia, R. Pereiro-Gracia, M. Fernandez-Garcia, A. Sanz-Medel, T.R. Harville and R.K. Marcus, J. Anal. At. Spectrom., 10 (1995) 671.
12. Y. Ye and R.K. Marcus, Spectrochim. Acta, Part B, 50 (1995) 997.
13. J.L. Wilson, J.B.O. Caughman II, P.L. Ngyuen and D.N. Ruzic, J. Vac. Sci. Technol. A, 7 (1989) 972.
14. A.P. Paranjpe, J.P. McVittie and S.A. Self, J. Appl. Phys., 67 (1990) 6718.
15. N. Mutsukura, K. Kobayashi and Y. Machi, J. Appl. Phys., 66 (1989) 4688.
16. S.G. Ingram, B.M. Annaratone and M. Ohuchi, Rev. Sci. Instrum., 61 (1990) 1883.
17. T.I. Cox, V.G.I. Deshmukh, D.A.O. Hope, A.J. Hydes, N.S.J. Braithwaite and N.M.P. Benjamin, J. Phys. D: Appl. Phys., 20 (1987) 820.
18. B.M. Annaratone, M.W. Allen and J.E. Allen, J. Phys. D: Appl. Phys., 25 (1992) 417.
19. P.Q. Lu, P.Z. Gong, T.Z. Lin and R.S. Houk, Spectrochim. Acta Part B, 43 (1988) 273.
20. D. Fang and R.K. Marcus, Spectrochim. Acta Part B, 45 (1990) 1053.
21. G. Dilecce, M. Capitelli and S.D. Bendictis, J. Appl. Phys., 69 (1991) 121.
22. W. McColl, C. Brooks and M.L. Brake, J. Vac. Sci. Technol. A, 11 (1993) 1152.
23. P.E. Walters, T.L. Chester and J.D. Winefordner, Appl. Spectrosc., 31 (1977) 1.
24. F.F. Chen, in R.H. Huddlestone and S.L. Leonard (Eds.), Plasma Diagnostic Techniques, Academic, New York, 1965, Chap. 4.
25. J.D. Swift and M.J.R. Schwar, Electrical Probes for Plasma Diagnostics, Elsevier, New York, 1971.
26. R.M. Clements, J. Vac. Sci. Technol., 15 (1978) 193.
27. I. Langmuir, Collected Works of Irving Langmuir, G. Suits (Ed.), Vols. 4 and 5, Pergamon, Long Island City, NY, 1961.
28. J.G. Laframboise, University of Toronto, Institute for Aerospace Studies Report No. 100, 1966.
29. J.M. Anderson, J. Appl. Phys., 31 (1960) 511.
30. G. Lemperiere, J.M. Poitevin and C. Fouryier, J. Phys. D., 11 (1978) 293.
31. D.C. Duckworth and R.K. Marcus, J. Anal. At. Spectrom., 7 (1992) 711.
32. M. Cicha, Z.C. Sun., J. Glosik and M. Tichy, Contrib. Plasma Phys., 30 (1990) 185.
33. M.J. Heintz and G.M. Hieftje, Spectrochim. Acta Part B, in press.
34. B. Chapman, Glow Discharge Processes, John Wiley, New York, 1980.
35. A. Bogaerts, M. van Straaten and R. Gijbels, Spectrochim. Acta Part B, 50 (1995) 179.
36. R.R. Laher and F.R. Gilmore, J. Phys. Chem. Ref. Data, 19 (1990) 277.
37. C. Lai, R.A. Breun, P.W. Sandstrom, A.E. Wendt, N. Hershkowitz and R.C. Woods, J. Vac. Sci. Technol. A. 11 (1993) 1199.
38. D.M. Mehs and T.M. Niemczyk, Appl. Spectrosc., 32 (1978) 269.
39. N.P. Ferreira, H.G. Human and L.R.P. Butler, Spectrochim. Acta Part B, 35 (1980) 287.
40. D.N. Ruzic and J.L. Wilson, J. Vac. Sci. Technol. A, 8 (1990) 3746.
41. K.W. Busch and T.J. Vickers, Spectrochim. Acta Part B. 28 (1973) 85.
42. C. Lazik and R.K. Marcus, Spectrochimica Acta Part B, 49 (1994) 649.
43. E.B.M. Steers and F. Leis, Spectrochim. Acta Part B, 46 (1991) 527.
44. M. Parker and R.K. Marcus, Spectrochim. Acta Part B, 506 (1995) 617.
45. M. Parker and R.K. Marcus, Appl. Spectrosc., in press.
46. C.R. Shick, Jr. and R.K. Marcus, Appl. Spectrosc., in press.