Electrostatic driven 3-way silicon microvalve for pneumatic applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 88-91

  Messner, S ^a   Schaible, J ^b   Vollmer, J ^b   Sandmaier, H ^a,d   Zengerle, R ^c  

^a Institute of Micromachining and Information Technology   (Germany)

^b Hoerbiger Origa Systems GmbH   (Germany)

^c UNIVERSITY OF FREIBURG   (Germany)

^d UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTROSTATIC DEVICES; PNEUMATICS; PRESSURE; SILICON; SUBSTRATES; TEMPERATURE;

ELECTROSTATIC ACTUATION; ELECTROSTATIC DRIVEN MICROVALVE; POWER CONSUMPTION;

MICROACTUATORS;

EID: 0037480744     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. J.H. Jerman; Electrically-Activated, Normally Closed Diaphragm Valves; Proceedings Transducers 91, San Francisco, USA, 1991
2. Zdeblick, et al., Thermopneumatically actuated microvalve and integrated electro-fluidic circuits, Proc. Actuator 94, Bremen, S. 56-60, 1994
3. T. Ohnstein, et al.; Micromachined Silicon Microvalve; Proceedings MEMS 90, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, New York, USA, 1990
4. S. Messner, et al.; "A Normally-Closed, Bimetallically Actuaed 3-Way Microvalve for Pneumatic Ap-plications"; MEMS 98; Heidelberg 1998
5. J. Schaible, et al.; "Electrostatic Microvalves in Slicon with 2-Way-Function for Industrial Applications; Transducers '01; Munich; Germany; 2001