A micro-mechanical resonator with programmable frequency capability

Smart Materials and Structures

Volumn 21, Issue 3, 2012, Pages

  Merced, Emmanuelle ^a,b   Cabrera, Rafmag ^a,b   Dávila, Noraica ^a,b   Fernández, Félix E ^b   Sepúlveda, Nelson ^a,b  

^a Michigan State University   (United States)

^b UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY CAPABILITY; MEMORY STATE; MICRO-BRIDGE; PHOTO-THERMAL; STRESS CHANGES;

C (PROGRAMMING LANGUAGE); COATINGS; MICROMECHANICAL RESONATORS; SILICON COMPOUNDS;

NATURAL FREQUENCIES;

EID: 84857854789     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/21/3/035007     Document Type: Article

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