SCOPUS 정보 검색 플랫폼

Volumn 4, Issue 6, 2012, Pages 2101-2108

Precisely-controlled fabrication of single ZnO nanoemitter arrays and their possible application in low energy parallel electron beam exposure

(5) He, H a She, J C a Huang, Y F a Deng, S Z a Xu, N S a

a SUN YAT SEN UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; ELECTRON BEAM LITHOGRAPHY; PLASMA ETCHING;

ELECTRON-BEAM EXPOSURE; EMITTER ARRAYS; ENHANCING EFFECT; HOLE PATTERNS; LOW ENERGIES; LOW VOLTAGES; NANO-EMITTER ARRAYS; NANOHOLES; NITROGEN-DOPING; SURFACE SMOOTHING; ZNO;

ZINC OXIDE;

NANOMATERIAL; ZINC OXIDE;

ARTICLE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; ELECTRON; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; PARTICLE SIZE; SURFACE PROPERTY; ULTRASTRUCTURE;

CRYSTALLIZATION; ELECTRONS; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MOLECULAR CONFORMATION; NANOSTRUCTURES; PARTICLE SIZE; SURFACE PROPERTIES; ZINC OXIDE;

EID: 84857834399 PISSN: 20403364 EISSN: 20403372 Source Type: Journal
DOI: 10.1039/c2nr11636g Document Type: Article

Times cited : (31)

References (25)

1
- 33646040110
- T. Utsumi Microelectron. Eng. 2006 83 738
- (2006) Microelectron. Eng. , vol.83 , pp. 738
- Utsumi, T.¹

2
- 0000178724
- G. I. Winograd L. Han M. A. McCord R. F. W. Pease V. Krishnamurthi J. Vac. Sci. Technol., B 1998 16 3174
- (1998) J. Vac. Sci. Technol., B , vol.16 , pp. 3174
- Winograd, G.I.¹ Han, L.² McCord, M.A.³ Pease, R.F.W.⁴ Krishnamurthi, V.⁵

3
- 0035450058
- T. H. P. Chang M. Mankos K. Y. Lee L. P. Muray Microelectron. Eng. 2001 57-58 117
- (2001) Microelectron. Eng. , vol.5758 , pp. 117
- Chang, T.H.P.¹ Mankos, M.² Lee, K.Y.³ Muray, L.P.⁴

4
- 19944433803
- L. R. Baylor W. L. Gardner X. Yang R. J. Kasica M. A. Guillorn B. Blalock H. Cui D. K. Hensley S. Islam D. H. Lowndes A. V. Melechko V. I. Merkulov D. C. Joy P. D. Rack M. L. Simpson D. K. Thomas J. Vac. Sci. Technol., B 2004 22 3021
- (2004) J. Vac. Sci. Technol., B , vol.22 , pp. 3021
- Baylor, L.R.¹ Gardner, W.L.² Yang, X.³ Kasica, R.J.⁴ Guillorn, M.A.⁵ Blalock, B.⁶ Cui, H.⁷ Hensley, D.K.⁸ Islam, S.⁹ Lowndes, D.H.¹⁰ Melechko, A.V.¹¹ Merkulov, V.I.¹² Joy, D.C.¹³ Rack, P.D.¹⁴ Simpson, M.L.¹⁵ Thomas, D.K.¹⁶

5
- 80052598434
- N. Koshida T. Ohta B. Gelloz A. Kojima Curr. Opin. Solid State Mater. Sci. 2011 15 183
- (2011) Curr. Opin. Solid State Mater. Sci. , vol.15 , pp. 183
- Koshida, N.¹ Ohta, T.² Gelloz, B.³ Kojima, A.⁴

6
- 0037098548
- K. Ohtsuka K. Yonei Jpn. J. Appl. Phys. 2002 41 L667
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 667
- Ohtsuka, K.¹ Yonei, K.²

7
- 33750521348
- D. F. Liu Y. J. Xiang X. C. Wu Z. X. Zhang L. F. Liu L. Song X. W. Zhao S. D. Luo W. J. Ma J. Shen W. Y. Zhou G. Wang C. Y. Wang S. S. Xie Nano Lett. 2006 6 2375
- (2006) Nano Lett. , vol.6 , pp. 2375
- Liu, D.F.¹ Xiang, Y.J.² Wu, X.C.³ Zhang, Z.X.⁴ Liu, L.F.⁵ Song, L.⁶ Zhao, X.W.⁷ Luo, S.D.⁸ Ma, W.J.⁹ Shen, J.¹⁰ Zhou, W.Y.¹¹ Wang, G.¹² Wang, C.Y.¹³ Xie, S.S.¹⁴

8
- 33947388818
- J. B. Cui U. Gibson Nanotechnology 2007 18 155302
- (2007) Nanotechnology , vol.18 , pp. 155302
- Cui, J.B.¹ Gibson, U.²

9
- 57349110722
- S. Xu Y. G. Wei M. Kirkham J. Liu W. J. Mai D. Davidovic R. L. Snyder Z. L. Wang J. Am. Chem. Soc. 2008 130 14958
- (2008) J. Am. Chem. Soc. , vol.130 , pp. 14958
- Xu, S.¹ Wei, Y.G.² Kirkham, M.³ Liu, J.⁴ Mai, W.J.⁵ Davidovic, D.⁶ Snyder, R.L.⁷ Wang, Z.L.⁸

10
- 14144249683
- N. S. Xu S. E. Huq Mater. Sci. Eng., R 2005 48 47
- (2005) Mater. Sci. Eng., R , vol.48 , pp. 47
- Xu, N.S.¹ Huq, S.E.²

11
- 38349148649
- X. S. Fang Y. Bando U. K. Gautam C. H. Ye D. Golberg J. Mater. Chem. 2008 18 509
- (2008) J. Mater. Chem. , vol.18 , pp. 509
- Fang, X.S.¹ Bando, Y.² Gautam, U.K.³ Ye, C.H.⁴ Golberg, D.⁵

12
- 49649095629
- J. Liu J. C. She S. Z. Deng J. Chen N. S. Xu J. Phys. Chem. C 2008 112 11685
- (2008) J. Phys. Chem. C , vol.112 , pp. 11685
- Liu, J.¹ She, J.C.² Deng, S.Z.³ Chen, J.⁴ Xu, N.S.⁵

13
- 61649097943
- L. W. Feng J. Liu J. C. She N. S. Xu S. Z. Deng J. Chen J. Cryst. Growth 2009 311 1435
- (2009) J. Cryst. Growth , vol.311 , pp. 1435
- Feng, L.W.¹ Liu, J.² She, J.C.³ Xu, N.S.⁴ Deng, S.Z.⁵ Chen, J.⁶

14
- 50349084354
- J. C. Woo G. H. Kim J. G. Kim C. I. Kim Surf. Coat. Technol. 2008 202 5705
- (2008) Surf. Coat. Technol. , vol.202 , pp. 5705
- Woo, J.C.¹ Kim, G.H.² Kim, J.G.³ Kim, C.I.⁴

15
- 0037279239
- J. S. Park H. J. Park Y. B. Hahn G. C. Yi A. Yoshikawa J. Vac. Sci. Technol., B 2003 21 800
- (2003) J. Vac. Sci. Technol., B , vol.21 , pp. 800
- Park, J.S.¹ Park, H.J.² Hahn, Y.B.³ Yi, G.C.⁴ Yoshikawa, A.⁵

16
- 75749097384
- J. B. Chen C. J. Xu J. C. She S. Z. Deng J. Chen N. S. Xu J. Appl. Phys. 2010 107 024312
- (2010) J. Appl. Phys. , vol.107 , pp. 024312
- Chen, J.B.¹ Xu, C.J.² She, J.C.³ Deng, S.Z.⁴ Chen, J.⁵ Xu, N.S.⁶

17
- 56849124601
- J. C. She Z. M. Xiao Y. H. Yang S. Z. Deng J. Chen G. W. Yang N. S. Xu ACS Nano 2008 2 2015
- (2008) ACS Nano , vol.2 , pp. 2015
- She, J.C.¹ Xiao, Z.M.² Yang, Y.H.³ Deng, S.Z.⁴ Chen, J.⁵ Yang, G.W.⁶ Xu, N.S.⁷

18
- 34948889945
- Z. Y. Zhang K. Yao Y. Liu C. H. Jin X. L. Liang Q. Chen L. M. Peng Adv. Funct. Mater. 2007 17 2478
- (2007) Adv. Funct. Mater. , vol.17 , pp. 2478
- Zhang, Z.Y.¹ Yao, K.² Liu, Y.³ Jin, C.H.⁴ Liang, X.L.⁵ Chen, Q.⁶ Peng, L.M.⁷

19
- 33847126150
- J. C. She S. An S. Z. Deng Jun Chen Z. M. Xiao J. Zhou N. S. Xu Appl. Phys. Lett. 2007 90 073103
- (2007) Appl. Phys. Lett. , vol.90 , pp. 073103
- She, J.C.¹ An, S.² Deng, S.Z.³ Chen, J.⁴ Xiao, Z.M.⁵ Zhou, J.⁶ Xu, N.S.⁷

20
- 34548185866
- F. A. Selim M. H. Weber D. Solodovnikov K. G. Lynn Phys. Rev. Lett. 2007 99 085502
- (2007) Phys. Rev. Lett. , vol.99 , pp. 085502
- Selim, F.A.¹ Weber, M.H.² Solodovnikov, D.³ Lynn, K.G.⁴

21
- 70449747992
- Final Report" of NANOLITH, Arrays of microguns for parallel e-beam nanolithography, IST-1999-11806
- G. Fortunato L. Mariucci R. Carluccio A. Pecora V. Foglietti Appl. Surf. Sci. 2000 95 154
- (2000) Appl. Surf. Sci. , vol.95 , pp. 154
- Fortunato, G.¹ Mariucci, L.² Carluccio, R.³ Pecora, A.⁴ Foglietti, V.⁵

22
- 33745132735
- C. S. A. Durisety R. Vijayraghavan L. Seshan S. K. Islam B. J. Blalock Analog Integr. Circuits Signal Process. 2006 48 143
- (2006) Analog Integr. Circuits Signal Process. , vol.48 , pp. 143
- Durisety, C.S.A.¹ Vijayraghavan, R.² Seshan, L.³ Islam, S.K.⁴ Blalock, B.J.⁵

23
- 0004276855
- Wiley, New York
- H. A. Bethe and J. Ashkin, Experimental Nuclear Physics, Wiley, New York, 1953
- (1953) Experimental Nuclear Physics
- Bethe, H.A.¹ Ashkin, J.²

24
- 0003445248
- Marcel Dekker, New York
- S. Nonogaki, T. Ueno and T. Ito, Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology, Marcel Dekker, New York, 1998
- (1998) Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
- Nonogaki, S.¹ Ueno, T.² Ito, T.³

25
- 0029305796
- C. W. Lo M. J. Rooks W. K. Lo M. Isaacson H. G. Craighead J. Vac. Sci. Technol., B 1995 13 812
- (1995) J. Vac. Sci. Technol., B , vol.13 , pp. 812
- Lo, C.W.¹ Rooks, M.J.² Lo, W.K.³ Isaacson, M.⁴ Craighead, H.G.⁵

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