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Volumn 22, Issue 6, 2004, Pages 3021-3024

Initial lithography results from the digital electrostatic e-beam array lithography concept

Author keywords

[No Author keywords available]

Indexed keywords

BEAMLETS; DIGITALLY ADDRESSABLE FIELD-EMISSION ARRAY (DAFEA); ELECTRON ENERGY; NANOFIBERS;

EID: 19944433803     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1824060     Document Type: Conference Paper
Times cited : (25)

References (12)
  • 2
    • 0032491482 scopus 로고    scopus 로고
    • Z. F. Ren et al., Science 282, 1105 (1998).
    • (1998) Science , vol.282 , pp. 1105
    • Ren, Z.F.1
  • 6
    • 13244257692 scopus 로고    scopus 로고
    • X. Yang, et al. (to be published)
    • X. Yang, et al. (to be published).
  • 7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.