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Volumn 22, Issue 6, 2004, Pages 3021-3024
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Initial lithography results from the digital electrostatic e-beam array lithography concept
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Author keywords
[No Author keywords available]
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Indexed keywords
BEAMLETS;
DIGITALLY ADDRESSABLE FIELD-EMISSION ARRAY (DAFEA);
ELECTRON ENERGY;
NANOFIBERS;
CARBON NANOTUBES;
CMOS INTEGRATED CIRCUITS;
ELECTROSTATICS;
EXTRACTION;
EXTRAPOLATION;
FIELD EMISSION DISPLAYS;
LITHOGRAPHY;
NANOSTRUCTURED MATERIALS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
ELECTRON BEAMS;
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EID: 19944433803
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1824060 Document Type: Conference Paper |
Times cited : (25)
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References (12)
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