Estimation of AFM tip shape and status in linewidth and profile measurement

Journal of Nanoscience and Nanotechnology

Volumn 11, Issue 12, 2011, Pages 11041-11044

  Han, Guoqiang ^a,b   Jiang, Zhuangde ^b,c   Jing, Weixuan ^b   Prewett, Philip D ^c   Jiang, Kyle ^c  

^a FUZHOU UNIVERSITY   (China)

^b XI'AN JIAOTONG UNIVERSITY   (China)

^c UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Atomic force microscopy (AFM); Linewidth and profile measurement; Scanning electron microscope (SEM); Tip characterization

Indexed keywords

AFM IMAGE; AFM TIP; ATOMIC FORCE; CURVATURE RADII; GEOMETRIC RELATIONSHIPS; INSTALLATION ANGLE; MODEL BASED APPROACH; POSITION PARAMETERS; PROBE TIPS; PROFILE MEASUREMENT; SAMPLE STRUCTURE; SCANNING ELECTRON MICROSCOPE (SEM); SCANNING ELECTRON MICROSCOPES; SPECIMEN SURFACES; TEST SPECIMENS; TILTING ANGLE;

ATOMIC FORCE MICROSCOPY; ESTIMATION; LINEWIDTH; MEASUREMENTS; SCANNING ELECTRON MICROSCOPY;

NANOPROBES;

EID: 84857182287     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.4032     Document Type: Conference Paper

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