Silicon test object of the linewidth of the nanometer range for SEM and AFM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6648, Issue , 2007, Pages

  Novikov, Yu A ^a   Gavrilenko, V P ^b   Ozerin, Yu V ^c   Rakov, A V ^a   Todua, P A ^b  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b Center for Surface and Vacuum Research   (Russian Federation)

^c Mikron Corporation   (Russian Federation)

Author keywords

Atomic force microscope; Calibration; Linewidth; Scanning electron microscope; Test object

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; CRYSTALLOGRAPHY; LINEWIDTH; SCANNING ELECTRON MICROSCOPY;

MONOSILICON SURFACES; SIDEWALLS; SILICON TEST OBJECTS; TRAPEZOIDAL PROFILES;

NANOCRYSTALLINE SILICON;

EID: 42149129068     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.733134     Document Type: Conference Paper

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