Electrical and thermal conduction in atomic layer deposition nanobridges down to 7 nm thickness

Nano Letters

Volumn 12, Issue 2, 2012, Pages 683-686

  Yoneoka, Shingo ^a   Lee, Jaeho ^a   Liger, Matthieu ^b,c   Yama, Gary ^b   Kodama, Takashi ^a   Gunji, Marika ^a   Provine, J ^a   Howe, Roger T ^a   Goodson, Kenneth E ^a   Kenny, Thomas W ^a  

^a Stanford University   (United States)

^b BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

^c GOOGLE INC   (United States)

Author keywords

Atomic layer deposition; electrical conductivity; Lorenz number; platinum; size effect; thermal conductivity

Indexed keywords

BULK VALUE; CONDUCTIVITY DATA; ELECTRICAL BEHAVIORS; ELECTRICAL CONDUCTIVITY; HIGH QUALITY; LORENZ NUMBER; MEASUREMENT RESULTS; METAL INTERCONNECTS; NANO LAYERS; NANO TRANSISTORS; NANO-BRIDGES; PHONON CONDUCTION; PLATINUM FILMS; SEMICONDUCTOR NANOWIRE; SIZE EFFECTS; TEMPERATURE RANGE; THERMAL CONDUCTION;

ATOMIC LAYER DEPOSITION; CARBON NANOTUBES; ELECTRIC CONDUCTIVITY; GRAIN BOUNDARIES; NANOWIRES; PLATINUM; SEMICONDUCTOR DEVICES; SURFACE REACTIONS; THERMAL CONDUCTIVITY;

THERMAL CONDUCTIVITY OF SOLIDS;

METAL NANOPARTICLE; PLATINUM;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; ELECTRIC CONDUCTIVITY; PARTICLE SIZE; SURFACE PROPERTY; THERMAL CONDUCTIVITY;

ELECTRIC CONDUCTIVITY; MEMBRANES, ARTIFICIAL; METAL NANOPARTICLES; PARTICLE SIZE; PLATINUM; SURFACE PROPERTIES; THERMAL CONDUCTIVITY;

EID: 84856955399     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl203548w     Document Type: Article

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