Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

Applied Optics

Volumn 51, Issue 3, 2012, Pages 365-369

  Nikzad, Shouleh ^a   Hoenk, Michael E ^a   Greer, Frank ^a   Jacquot, Blake ^a   Monacos, Steve ^a   Jones, Todd J ^a   Blacksberg, Jordana ^a   Hamden, Erika ^b   Schiminovich, David ^b   Martin, Chris ^c   Morrissey, Patrick ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Och Spine at New York Presbyterian Hospitals   (United States)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CHARGE COUPLED DEVICES; DEPOSITION; EFFICIENCY; INTERFACES (MATERIALS); MOLECULAR BEAM EPITAXY; PARTICLE BEAMS; PHOTONS; SEMICONDUCTOR DOPING;

ATOMIC SCALE CONTROL; DEVICE PERFORMANCE; INTERNAL QUANTUM EFFICIENCY; NEAR ULTRAVIOLET; PRECISION CONTROL; SINGLE PHOTON COUNTING; THIN FILM MATERIAL; ULTRA VIOLET DETECTION;

QUANTUM EFFICIENCY;

SILICON;

ARTICLE; CHEMISTRY; ELECTRON; EQUIPMENT DESIGN; INSTRUMENTATION; OPTICAL INSTRUMENTATION; PHOTON; QUANTUM THEORY; RADIOMETRY; ULTRAVIOLET RADIATION;

ELECTRONS; EQUIPMENT DESIGN; OPTICAL DEVICES; PHOTONS; QUANTUM THEORY; RADIOMETRY; SILICON; ULTRAVIOLET RAYS;

EID: 84856280402     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.000365     Document Type: Article

References (25)

1. R. McClintock, J. L. Pau, C. Bayram, B. Fain, P. Giedraitis, M. Razeghi, and M. P. Ulmer, "III-nitride avalanche photodiodes," Proc. SPIE 7222, 72220U (2009).
2. J. C. Carrano, D. J. H. Lambert, C. J. Eiting, C. J. Collins, T. Li, S.Wang, B. Yang, A. L. Beck, R. D. Dupuis, and J. C. Campbell, "GaN avalanche photodiodes," Appl. Phys. Lett. 76, 924-926 (2000).
3. R. M. Field, J. Larry, J. Cohn, L. Paninski, and K. L. Shepard, "A low-noise, single-photon avalanche diode in standard 0.13 μm complementary metal-oxide-semiconductor process," Appl. Phys. Lett. 97, 211111 (2010).
4. J. Hynecek, "Impactron-A new solid state image intensifier," IEEE Trans. Electron Devices 48, 2238-2241 (2001). (Pubitemid 33018185)
5. P. Jerram, P. Pool, R. Bell, D. Burt, S. Browring, S. Spencer, M. Hazelwood, I. Moody, N. Catlett, and P. Heyes, "The LLCCD: low light imaging without the need for an intensifier," Proc. SPIE 4306, 178-186 (2001). (Pubitemid 32807301)
6. C. D. Mackay, R. N. Tubbs, R. Bell, D. Burt, P. Jerram, and I. Moody, "Sub-electron read noise at MHz pixel rates," Proc. SPIE 4306, 289-298 (2001). (Pubitemid 32807313)
7. C. Niclass, A. Rochas, P. A. Besse, and E. Charbon, "Design and characterization of a CMOS 3-D image sensor based on single photon avalanche diodes," IEEE J. Solid-State Circuits 40, 1847-1854 (2005) (Pubitemid 41352162)
8. N. Faramarzpour, M. J. Deen, S. Shirani, and Q. Fang, "Fully integrated single photon avalanche diode detector in standard CMOS 0.18 μm technology," IEEE Trans. Electron Devices 55, 760-767 (2008). (Pubitemid 351404531)
9. M. E. Hoenk, P. J. Grunthaner, F. J. Grunthaner, R. W. Terhune, M. Fattahi, and H. F. Tseng, "Growth of a deltadoped silicon layer by molecular-beam epitaxy on a chargecoupled device for reflection-limited ultraviolet quantum efficiency," Appl. Phys. Lett. 61, 1084-1086 (1992).
10. J. Blacksberg, M. E. Hoenk, S. T. Elliott, S. E. Holland, and S. Nikzad, "Enhanced QE of high purity silicon imagers by ultralow temperature surface modification using Sb-doping," Appl. Phys. Lett. 87, 254101 (2005)
11. S. Nikzad, M. E. Hoenk, P. J. Grunthaner, R. W. Terhune, F. J. Grunthaner, R. Wizenread, M. Fattahi, and H-F. Tseng, "Delta- doped CCDs: high QE with long-term stability at UV and visible wavelengths," Proc. SPIE 2198, 907-915 (1994).
12. E. T. Hamden, F. Greer, M. E. Hoenk, J. Blacksberg, M. R. Dickie, S. Nikzad, C. Martin, and D. Schiminovich, "UV anti-reflection coatings for use in silicon detector design," Appl. Opt. 50, 4180-4188 (2011).
13. F. Greer, E. Hamden, B. C. Jacquot, M. E. Hoenk, J. Blacksberg, S. P. Monacos, M. R. Dickie, D. Schiminovich, and S. Nikzad, manuscript in preparation for Nature Nanotechnology
14. M. E. Hoenk, T. J. Jones, M. R. Dickie, F. Greer, T. J. Cunningham, E. R. Blazejewski, and S. Nikzad, "Delta-doped back-illuminated CMOS imaging arrays: progress and prospects," Proc. SPIE 7419, 74190T (2009).
15. B. C. Jacquot, S. P. Monacos, T. J. Jones, J. Blacksberg, M. E. Hoenk, and S. Nikzad, "Characterization and absolute QE measurements of delta-doped N-channel and P-channel CCDs," Proc. SPIE 7742, 774201 (2010).
16. B. C. Jacquot, S. P. Monacos, M. E. Hoenk, F. Greer, T. J. Jones, and S. Nikzad, "A system and methodologies for absolute quantum efficiency measurements from the vacuum ultraviolet through the near infrared," Rev. Sci. Instrum. 82, 043102 (2011).
17. S. M. Baggett, J. W. MacKenty, R. A. Kimble, T. Borders, B. Hilbert, S. Deustua, V. Kozhurina-Platais, K. S. Long, A. Riess, R. Gilliland, R. J. Hill, and J. Kalirai, "WFC3 detectors: on-orbit performance," Proc. SPIE 7731, 773138 (2010).
18. N. R. Collins, N. Boehm, G. Delo, R. D. Foltz, R. J. Hill, E. Kan, R. A. Kimble, E. Malumuth, R. Rosenberry, A. Waczynski, Y. Wen, S. Baggett, H. Bushouse, S. Deustua, J. Kim-Quijano, J. MacKenty, A. Martel, and E. Sabbi, "Wide field camera 3 CCD quantum efficiency hysteresis: characterization and mitigation," Proc. SPIE 7439, 74390 (2009).
19. L. R. Canfield, R. E. Vest, R. Korde, H. Schmidtke, and R. Desor, "Absolute silicon photodiodes for 160 nm to 254 nm photons," Metrologia 35, 329-334 (1998). (Pubitemid 128432502)
20. J. R. Janesick, Photon Transfer : DN [lambda] (SPIE, 2007).
21. P. F. Morrissey, S. R. McCandliss, and P.D. Feldman, " Vacuumultraviolet quantum efficiency of a thinned, backsideilluminated charge-coupled device," Appl. Opt. 34, 4640-4650 (1995).
22. S. Nikzad, T. J. Cunningham, M. E. Hoenk, R. P. Ruiz, D. M. Soules, and S. E. Holland, "Direct detection of 0.1-20 keVelectrons with delta doped, fully depleted, high purity silicon p-i-n diode arrays," Appl. Phys. Lett. 89, 182114-182116 (2006).
23. C. Martin, T. Barlow, T. Conrow, K. Forster, P. G. Friedman, R. McLean, M. Morais, P.F. Morrissey, F. Raison, D. Schiminovich, T. Small, T. Wyder, and C. K. Xu, "The Galaxy Evolution Explorer," Proc. SPIE 4854, 336-350 (2003).
24. D. C. Martin, M. Seibert, J. D. Neill, D. Schiminovich, K. Forster, R. M. Rich, B. Y. Welsh, B. F. Madore, J. M. Wheatley, P. Morrissey, and T. A. Barlow, "A turbulent wake as a tracer of 30,000 years of Mira's mass loss history," Nature 448, 780-783 (2007). (Pubitemid 47266335)
25. e2v-technologies, e2V Low-Light Technical Note 4: Dark Signal and Clock-Induced Charge in L3VisionTM CCD Sensors (2004).