Delta-doped back-illuminated CMOS imaging arrays: Progress and prospects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7419, Issue , 2009, Pages

  Hoenk, Michael E ^a   Jones, Todd J ^a   Dickie, Matthew R ^a   Greer, Frank ^a   Cunningham, Thomas J ^a   Blazejewski, Edward R ^a   Nikzad, Shouleh ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Astronomy; Back illuminated; Back illumination; CCD; CCDs; CMOS; Delta doped; Detectors; Imagers

Indexed keywords

CHARGE COUPLED DEVICES; CMOS INTEGRATED CIRCUITS; INFRARED DEVICES; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; PASSIVATION; QUANTUM EFFICIENCY; SIGNAL PROCESSING; SILICON WAFERS;

BACK ILLUMINATION; BACK-ILLUMINATED; CMOS; CMOS IMAGING; DELTA-DOPED; DELTA-DOPING; HIGH-PERFORMANCE CMOS; IMAGING ARRAYS; SURFACE PASSIVATION; THINNINGS;

TEMPERATURE;

EID: 70449433937     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.832326     Document Type: Conference Paper

References (25)

1. J. Janesick, J. Pinter, R. Potter, T. Elliott, J. Andrews, J. Tower, J. Cheng, J. Bishop, "Fundamental performance differences between CMOS and CCD imagers: Part III," SPIE Proceedings, 7439A-6, San Diego, CA, August 2009.
2. George E. Smith, "The invention and early history of the CCD," Nuclear Instruments and Methods in Physics Research A, 607: 1-6, 2009.
3. Jeff Hester and Paul Scowen (Arizona State University), and NASA/ESA, "Pillars of Creation," http://www.spacetelescope.org/images/html/ opo9544a.html
4. Robert Williams and the Hubble Deep Field Team (STScI) and NASA/ESA, "Hubble Deep Field," http://www.spacetelescope.org/images/html/ opo9601a1.html
5. Eugene F. Lally, "Mosaic Guidance for Interplanetary Travel," Space Flight Report to the Nation, pp. 2249-61, American Rocket Society, New York, October 9-15, 1961.
6. W. Boyle and G. Smith, "Charge coupled devices," Bell System Technical Journal, 49: 587-593, 1970.
7. R. Walden, R. Krambeck, R. Strain, J. Mckenna, N. Schryer, G. Smith, "The buried channel charge coupled device," Bell Syst. Tech. J., 51: 1635-1640, 1970.
8. S. R. Shortes, W. W. Chan, W. C. Rhines, J. B. Barton, D. R. Collins, "Characteristics of thinned backside-illuminated charge-coupled device imagers," Applied Physics Letters, 24(11): 565-567, 1974.
9. James R. Janesick, Scientific Charge-Coupled Devices, SPIE Press, PM 83, Bellingham, WA, 2001.
10. M. M. Blouke, M. W. Cowens, J. E. Hall, J. A. Westphal, A. B. Christensen, "Ultraviolet downconverting phosphor for CCDs," Applied Optics, 19(19): 3318-3321, 1980.
11. John T. Trauger, "Sensors for the Hubble Space Telescope Wide Field and Planetary Cameras (1 and 2)," in CCDs in astronomy: Proceedings of the Conference, Tucson, AZ, Sept. 6-8, 1989 (A91-45976 19-33), San Francisco, CA, Astronomical Society of the Pacific, 1990, p. 217-230.
12. M. Clampin, "WF/PC II CCDs," WFPC-II ISR 2-06, December 1992. http://www-int.stsci.edu/instruments/wfpc2/Wfpc2-isr/wfpc2-ccds.pdf
13. H. Bushouse, "WFC3 TV3 Testing: UVIS Science Monitor," WFC3 Instrument Science Report 2008-37.
14. M. H. Wong et al., "Overview of the WFC3 Cycle 17 Detector Monitoring Campaign," Instrument Science Report WFC3 2009-07.
15. P. J. Grunthaner, F. J. Grunthaner, R. W. Fathauer, T.-L. Lin, M. H. Hecht, L. D. Bell, W. J. Kaiser, F. D. Schowendgerdt, J. H. Mazur, "Hydrogen-terminated silicon substrates for low-temperature molecular beam epitaxy," Thin Solid Films, Vol. 183, p. 197, 1989.
16. M. H. Hecht, F. J. Grunthaner, and P. J. Grunthaner, private communications.
17. M.E. Hoenk, P.J. Grunthaner, F.J. Grunthaner, M. Fattahi, H.-F. Tseng and R.W. Terhune, "Growth of a Delta-Doped Silicon Layer By Molecular-Beam Epitaxy On a Charge-Coupled Device For Reflection-Limited Ultraviolet Quantum Efficiency," Appl. Phys. Lett., 61: 1084 (1992).
18. J.M. Jenkins, W.J. Barouki, E.W. Dunham, and J.S. McDonald, "High Precision photometry with Back-illuminated CCDs," in ASP Conf. Ser. Planets Beyond Our Solar System and Next Generation Space Missions, Ed. D. Sodarblum, 277-280 (1997).
19. S. T. Elliott and J. R. Janesick, unpublished, 1996.
20. J. Trauger, measurements with a delta doped CCD, unpublished, 1996.
21. S. Nikzad, M.E. Hoenk, P.J. Grunthaner, R.W. Terhune, F.J. Grunthaner, R. Winzenread, M. Fattahi, and H-F. Tseng, "Delta-doped CCDs: High QE with Longterm Stability at UV and Visible Wavelengths," Proc. of SPIE, 2198, 907 (1994).
22. T. J. Jones, P. W. Deelman, S. T. Elliott, P. J. Grunthaner, R. Wilson, S. Nikzad, "Thinned Charge Coupled Devices with Flat Focal Planes for UV Imaging," Proc. SPIE, Vol. 3695, pp. 148-156, 2000.
23. N. Zacharias, B. Dorland, R. Bredthauer, K. Boggs, G. Bredthauer, M. Lesser, "Realization and application of a 111 million pixel backside-illuminated detector and camera," Proc. SPIE 6690, 669008, 2007.
24. Paul Scowen, "The Star Formation Camera," http://arxiv.org/ftp/ arxiv/papers/0904/0904.1992.pdf
25. 2009 International Symposium on Extreme Ultraviolet Lithography, October 19-21, 2009, Prague, Czech Republic.