Ultraviolet antireflection coatings for use in silicon detector design

Applied Optics

Volumn 50, Issue 21, 2011, Pages 4180-4188

  Hamden, Erika T ^a   Greer, Frank ^b   Hoenk, Michael E ^b   Blacksberg, Jordana ^b   Dickie, Matthew R ^b   Nikzad, Shouleh ^b   Martin, D Christopher ^c   Schiminovich, David ^a  

^a Och Spine at New York Presbyterian Hospitals   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; COATINGS; EFFICIENCY; FILM PREPARATION; HAFNIUM OXIDES; REFRACTIVE INDEX; SILICON DETECTORS; SILICON OXIDES; SILICON WAFERS;

BACKSIDE-ILLUMINATED; BROADBAND ANTI REFLECTIONS; CHARGED COUPLED; CREATIVE SOLUTIONS; DEPOSITION TECHNIQUE; FUNCTIONAL DEVICES; INDEX OF REFRACTION; MULTI-LAYER-COATING;

QUANTUM EFFICIENCY;

EID: 79960641430     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.50.004180     Document Type: Article

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