SCOPUS 정보 검색 플랫폼

Journal of Sol-Gel Science and Technology

Volumn 61, Issue 2, 2012, Pages 449-454

RF magnetron sputtering of ZnO and Al-doped ZnO films from ceramic and nanopowder targets: A comparative study

(3) Bouznit, Y a Beggah, Y a Djessas, K b

a UNIVERSITY OF JIJEL (Algeria)

b UNIVERSITÉ DE PERPIGNAN (France)

Author keywords

Sputtering; Surface morphology; Targets; Thin films; Zinc oxide

Indexed keywords

AL-DOPED ZNO; AL-DOPING; CERAMIC TARGET; COMPARATIVE STUDIES; GLASS SUBSTRATES; NANO POWDERS; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE; SEM IMAGE; VISIBLE REGION; ZNO; ZNO FILMS;

ALUMINUM; CERAMIC MATERIALS; ENERGY GAP; MAGNETRON SPUTTERING; METALLIC FILMS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; OPTICAL BAND GAPS; OXIDE FILMS; SEMICONDUCTOR DOPING; SPUTTERING; SUBSTRATES; SURFACE MORPHOLOGY; TARGETS; THIN FILMS; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

FILM PREPARATION;

EID: 84856237650 PISSN: 09280707 EISSN: None Source Type: Journal
DOI: 10.1007/s10971-011-2645-y Document Type: Article

Times cited : (13)

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