Violet luminescence emitted from ZnO films deposited on Si substrate by rf magnetron sputtering

Applied Surface Science

Volumn 201, Issue 1-4, 2002, Pages 123-128

  Wang, Q P ^a   Zhang, D H ^a   Xue, Z Y ^a   Hao, X T ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

rf magnetron sputtering; Si substrate; Violet emission; ZnO films

Indexed keywords

ANNEALING; ELECTRON TRANSITIONS; LUMINESCENCE; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; SILICON; THERMAL EFFECTS; THIN FILM CIRCUITS; ULTRAVIOLET RADIATION; ZINC OXIDE;

VIOLET LUMINESCENCE;

SURFACE PHENOMENA;

EID: 0037202584     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00570-6     Document Type: Article

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