Control and characterization of structural and optical properties of ZnO thin films fabricated by thermal oxidation Zn metallic films

Optical Materials

Volumn 34, Issue 5, 2012, Pages 786-789

  Hong, Ruijin ^a   Xu, Liang ^a   Wen, Herui ^a   Chen, Jinglin ^a   Liao, Jinsheng ^a   You, Weixiong ^a  

^a JIANGXI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Rapid thermal oxidation; Transparent oxide semiconductor; Zinc oxide

Indexed keywords

AMORPHOUS FILMS; FABRICATION; II-VI SEMICONDUCTORS; INFRARED DEVICES; METALLIC FILMS; MICROELECTRONICS; OPTICAL FILMS; OPTICAL PROPERTIES; OXIDE FILMS; OXIDE SEMICONDUCTORS; RAPID THERMAL PROCESSING; THERMOOXIDATION; WIDE BAND GAP SEMICONDUCTORS; ZINC OXIDE;

COMPARATIVE CHARACTERIZATIONS; IN-DEPTH UNDERSTANDING; NEAR BAND EDGE EMISSIONS; OPTOELECTRONIC APPLICATIONS; RAPID THERMAL OXIDATION; STRUCTURAL AND OPTICAL PROPERTIES; TRANSPARENT OXIDE SEMICONDUCTOR; VISIBLE AND NEAR INFRARED;

THIN FILMS;

EID: 84856236095     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2011.11.005     Document Type: Article

References (28)

1. J.F. Wager Science 300 2003 1245
2. H. Kawazoe, M. Yasukawa, H. Hyodo, M. Kurita, H. Yanagi, and H. Hosono Nature 389 1997 939
3. A. Kudo, H. Yanagi, K. Ueda, H. Hosono, and H. Kawazoe Appl. Phys. Lett. 75 1999 2851
4. H. Ohta, K. Kawamura, M. Orita, M. Hirano, N. Sarukura, and H. Hosono Appl. Phys. Lett. 77 2000 475
5. B.G. Lewis, and D.C. Paine MRS Bull. 25 2000 22
6. E. Fortunato, D. Ginley, H. Hosono, and D.C. Paine MRS Bull. 32 2007 424
7. T. Minami Semicond. Sci. Technol. 20 2005 S35
8. M. Grundmann, H. Frenzel, A. Lajn, M. Lorenz, F. Schein, and H. von Wenckstern Phys. Status Solidi A 207 2010 1437
9. M.H. Huang, S. Mao, H. Feick, H. Yan, Y. Wu, H. Kind, E. Weber, R. Russo, and P.D. Yang Science 292 2001 1897
10. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono Nature 432 2004 488
11. J. Liu, D.B. Buchholz, J.W. Hennek, R.P.H. Chang, A. Facchetti, and T.J. Marks J. Am. Chem. Soc. 132 2010 11934
12. T. Kamiya, and H. Hosono NPG Asia Mater. 2 2010 15
13. J.-I. Song, J.-S. Park, H. Kim, Y.-W. Heo, J.-H. Lee, J.-J. Kim, G.M. Kim, and B.D. Choi Appl. Phys. Lett. 90 2007 022106
14. R. Martins, P. Barquinha, A. Pimentel, L. Pereira, and E. Fortunato Phys. Status Solidi A 202 2005 R95
15. B. Yaglioglu, H.Y. Yeom, R. Beresford, and D.C. Paine Appl. Phys. Lett. 89 2006 062103
16. D.W. Kwon, J.H. Kim, J.S. Chang, S.W. Kim, W. Kim, J.C. Park, I. Song, C.J. Kim, U.I. Jung, and B.-G. Park Appl. Phys. Lett. 98 2011 063502
17. Y.G. Wang, S.P. Lau, H.W. Lee, S.F. Yu, B.K. Tay, X.H. Zhang, and H.H. Hng J. Appl. Phys. 94 2003 354
18. J.P. Zhang, L.D. Zhang, L.Q. Zhu, Y. Zhang, M. Liu, X.J. Wang, and G. He J. Appl. Phys. 102 2007 114903
19. J.Y. Guo, C.X. Xu, B.X. Gu, and F.Y. Sheng J. Appl. Phys. 109 2011 024307
20. S. Newkirk, A.W. Urquhart, H.R. Zwicker, and E. Breval J. Mater. Res. 1 1986 81
21. W. Urquhart Adv. Mater. Proc. 140 1991 25
22. D.W. Yuan, S.G. Song, R.F. Yan, E.R. Ryba, and G. Simkovich J. Mater. Sci. 34 1999 1293
23. H.Y. Dang, J. Wang, and S.S. Fan Nanotechnology 14 2003 738
24. A.S. Grove Physics and Technology of Semiconductor Devices 1967 John Wiley & Sons
25. S.J. Henley, J.D. Carey, and S.R.P. Silva Phys. Rev. B 72 2005 195408
26. Y. Zhang, Z.Y. Zhang, B.X. Lin, Z.X. Fu, and J. Xu J. Phys. Chem. B 109 2005 19200
27. S. Shionoya, and W.M. Yen Phosphor Handbook 1999 Chemical Rubber Cleveland
28. H.Q. Ni, Y.F. Lu, and Z.M. Ren Jpn. J. Appl. Phys. Part 1 40 2001 4103