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Applied Surface Science

Volumn 258, Issue 8, 2012, Pages 3433-3437

Enhancement of Ti-containing hydrogenated carbon (TiC:H) films by high-power plasma-sputtering

(4) Gwo, Jyh a Chu, Chun Lin b Tsai, Ming Jui c Lee, Shyong a

a NATIONAL CENTRAL UNIVERSITY (Taiwan)

b NATIONAL NANO DEVICE LABORATORIES (Taiwan)

c INSTITUTE OF NUCLEAR ENERGY RESEARCH (Taiwan)

Author keywords

Diamond like carbon; High power pulsed magnetron sputtering; MeDLC

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; FILM PREPARATION; GLOW DISCHARGES; HYDROGENATION; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; TITANIUM CARBIDE; X RAY DIFFRACTION;

AMORPHOUS HYDROGENATED CARBON; DIAMOND LIKE CARBON; GLOW DISCHARGE SPECTROSCOPY; HIGH POWER PULSED MAGNETRON SPUTTERING; HIGH POWER PULSED MAGNETRON SPUTTERING (HPPMS); MEDLC; PIN-ON-DISK TRIBOMETERS; TARGET TO SUBSTRATE DISTANCE;

CARBON FILMS;

EID: 84856234815 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.11.090 Document Type: Article

Times cited : (6)

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