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Volumn 84, Issue 6, 2010, Pages 837-842

The influence of fluorine doping on the optical properties of diamond-like carbon thin films

Author keywords

Diamond like carbon; Fluorine doping; Fourier infrared spectroscopy; X ray photoelectron spectroscopy

Indexed keywords

ATOMIC FORCE MICROSCOPES; BAND TAIL; CHEMICAL BINDING; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON THIN FILMS; DIRECT CURRENT PLASMAS; DLC FILM; DOPING CONCENTRATION; FLUORINE DOPING; FLUORINE-DOPED; FOURIER; FOURIER INFRARED SPECTROSCOPY; INFRARED SPECTROSCOPIC STUDIES; OPTICAL TRANSPARENCY; SPECTROSCOPIC STUDIES; TRANSMITTANCE SPECTRA; X-RAY PHOTOELECTRONS;

EID: 74649083072     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.11.009     Document Type: Article
Times cited : (54)

References (32)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.