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Volumn 84, Issue 6, 2010, Pages 837-842
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The influence of fluorine doping on the optical properties of diamond-like carbon thin films
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Author keywords
Diamond like carbon; Fluorine doping; Fourier infrared spectroscopy; X ray photoelectron spectroscopy
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Indexed keywords
ATOMIC FORCE MICROSCOPES;
BAND TAIL;
CHEMICAL BINDING;
DIAMOND-LIKE CARBON;
DIAMOND-LIKE CARBON THIN FILMS;
DIRECT CURRENT PLASMAS;
DLC FILM;
DOPING CONCENTRATION;
FLUORINE DOPING;
FLUORINE-DOPED;
FOURIER;
FOURIER INFRARED SPECTROSCOPY;
INFRARED SPECTROSCOPIC STUDIES;
OPTICAL TRANSPARENCY;
SPECTROSCOPIC STUDIES;
TRANSMITTANCE SPECTRA;
X-RAY PHOTOELECTRONS;
CARBON FILMS;
CHEMICAL VAPOR DEPOSITION;
DIAMOND LIKE CARBON FILMS;
DIAMONDS;
DOPING (ADDITIVES);
ENERGY GAP;
FLUORINE;
FOURIER TRANSFORMS;
INFRARED SPECTROSCOPY;
OPTICAL BAND GAPS;
OPTICAL PROPERTIES;
PHOTOELECTRICITY;
PHOTOIONIZATION;
PHOTONS;
PLASMA DEPOSITION;
SPECTROSCOPIC ANALYSIS;
SURFACE ROUGHNESS;
X RAY PHOTOELECTRON SPECTROSCOPY;
OPTICAL FILMS;
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EID: 74649083072
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2009.11.009 Document Type: Article |
Times cited : (54)
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References (32)
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