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Volumn 20, Issue 7, 2011, Pages 1030-1035
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Argon plasma treatment techniques on steel and effects on diamond-like carbon structure and delamination
a
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Author keywords
Delamination; Diamond like carbon; Interface; Plasma enhanced CVD; Surface structure
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Indexed keywords
ADHESION ENHANCEMENT;
ARGON PLASMA PROCESS;
ARGON PLASMA TREATMENT;
ARGON PLASMAS;
CARBON CONTAMINATION;
CRYSTALLINITIES;
DEPOSITION PHASE;
DIAMOND-LIKE CARBON;
DIAMOND-LIKE CARBON COATINGS;
DLC FILM;
FILM ADHESION;
FILM DEPOSITION;
GROWTH PROCESS;
NANOCRYSTALLINES;
NANOSTRUCTURED SURFACE;
NANOTEXTURING;
PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION;
PLASMA PRE-TREATMENT;
PLASMA-ENHANCED CVD;
PRE-TREATMENT;
PRETREATMENT PROCESS;
REMOVAL OF CHROMIUM;
SELF-BIAS;
SUBSTRATE STRUCTURE;
SUBSTRATE SURFACE;
ADHESION;
ARGON;
BIAS VOLTAGE;
CHEMICAL VAPOR DEPOSITION;
CHROMIUM;
DIAMOND FILMS;
DIAMONDS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMAS;
STEEL SHEET;
SUBSTRATES;
SURFACE PROPERTIES;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
X RAY DIFFRACTION;
PLASMA DEPOSITION;
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EID: 79959985898
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2011.06.004 Document Type: Article |
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Times cited : (35)
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References (26)
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