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Thin Solid Films

Volumn 519, Issue 12, 2011, Pages 4087-4091

Influence of PECVD parameters on the properties of diamond-like carbon films

(7) Caschera, D a Cossari, P a Federici, F a Kaciulis, S a Mezzi, A a Padeletti, G a Trucchi, D M b

a CNR (Italy)

b CNR (Italy)

Author keywords

AFM; Diamond like carbon; Electrical resistivity; PECVD; XPS

Indexed keywords

AFM; DIAMOND-LIKE CARBON; ELECTRICAL RESISTIVITY; PECVD; XPS;

ATOMIC FORCE MICROSCOPY; CARBON FILMS; DIAMONDS; ELECTRIC CONDUCTIVITY; ION BOMBARDMENT; OXYGEN; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 79953715941 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.01.197 Document Type: Article

Times cited : (75)

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