TwymanGreen-type integrated laser interferometer array for parallel MEMS testing

Journal of Micromechanics and Microengineering

Volumn 22, Issue 1, 2012, Pages

  Oliva, M ^a   Michaelis, D ^a   Dannberg, P ^a   Jozwik M ^b   Liewski, K ^b   Kujawiska, M ^a   Zeitner, U D ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAY CONFIGURATIONS; FABRICATION PROCESS; INTEGRATED LASER; INTERFEROMETRIC MEASUREMENT; MEMS TESTING; WAFER LEVEL;

INTEGRATION; LASER INTERFEROMETRY; MEMS;

INTERFEROMETERS;

EID: 84855764758     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/1/015018     Document Type: Article

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