Polymer UV-moulding for micro-optical systems and O/E-integration

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4179, Issue 1, 2000, Pages 137-145

  Dannberg, Peter ^a   Mann, Gunnar ^a   Wagner, Lars ^a   Braeuer, Andreas ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Fiber arrays; Hybrid integration; Microlens arrays; Polymer micro optics; Replication; UV moulding; VCSELs; Wafer scale

Indexed keywords

MASKS; OPTICAL INSTRUMENT LENSES; PLASTIC FILMS; PRECISION ENGINEERING; SEMICONDUCTOR LASERS; ULTRAVIOLET RADIATION;

MICROLENS ARRAYS; POLYMER MICRO-OPTICS; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

MICROOPTICS;

EID: 0034546866     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.395684     Document Type: Article

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