Active, LCoS based laser interferometer for microelements studies

Optics Express

Volumn 14, Issue 21, 2006, Pages 9664-9678

  Kacperski, Jacek ^a   Kujawinska, Malgorzata ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT MODULATORS; LIQUID CRYSTALS; MEASUREMENT ERRORS; NATURAL FREQUENCIES; PHASE SHIFTERS; SILICON;

CARRIER FREQUENCY; LIQUID CRYSTAL ON SILICON (LCOS); MICROMEMBRANES; TWYMAN-GREEN INTERFEROMETER;

INTERFEROMETERS;

EID: 33750337045     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.009664     Document Type: Article

References (17)

1. S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, J.P. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Lasers Eng. 36, 77101, (2001)
2. L. Salbut, K. Patorski, M. Jozwik, J. Kacperski, C. Gorecki, A. Jacobelli, T. Dean, “Active micro-elements testing by interferometry using time-average and quasi-stroboscopic techniques,” in Microsystems Engineering: Metrology and Inspection III, C. Gorecki, ed., Proc. SPIE 5145, 23-32, (2003)
3. H. J. Tiziani, J. Liesener, C. Pruss, S. Reichelt, L. Seifert, “Active wavefront shaping and analysis,” in Eighth International Symposium on Laser Metrology, R. Rodriguez-Vera and F. Mendoza-Santoyo, eds., Proc. SPIE 5776, 1-9, (2005)
4. D. Dayton, S. Restaino, J. Gonglewski, “Novel spatial light modulators for active and adaptive optics,” in High-Resolution Wavefront Control: Methods, Devices, and Applications II, J. D. Gonglewski, M. A. Vorontsov, M. T. Gruneisen, eds., Proc. SPIE 4124, 78-88, (2000)
5. X. Wang, B. Wang, J. Pouch et al., “Liquid Crystal On Silicon (LCoS) wavefront corrector and beam steerer,” in Advanced Wavefront Control: Methods, Devices, and Applications, J. D. Gonglewski, M. A. Vorontsov, M. T. Gruneisen, eds., Proc. SPIE 5162, 139-146, (2003)
6. S. P. Kotova i in.,”Modal liquid crystal wavefront corrector,” Opt. Express 10, 1258-1272, (2002)
7. M. N. Horensteina, S. Pappasa, A. Fishov, T. G. Bifano, “Electrostatic micromirrors for subaperturing in an adaptive optics system,” J. Electrost. 54, 321-332, (2002)
8. L. Salbut, J. Kacperski, A. Styk, M. Jozwik, H. Urey, C. Gorecki, A. Jacobelli, T. Dean, “Interferometric methods for static and dynamic characterizations of micromembranes designed for sensing functions,” in Optical Micro- and Nanometrology in Manufacturing Technology, C. Gorecki and A. K. Asundi, eds., Proc. SPIE 5458, 287-298, (2004)
9. X. Wang, B. Wang, J. Pouch, F. Miranda, J. E Anderson, P. J Bos, “Performance evaluation of a liquid-crystal-on-silicon spatial light modulator,” Opt. Eng. 43, 2769-2774, (2004)
10. J. Kacperski, M. Kujawinska, “Multifunctional interferometric platform for static and dynamic MEMS measurement,” in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, A. Duparre, B. Singh, Zu-Han Gu, eds., Proc. SPIE 5878, 64-73, (2005) http: //www.hanaoh. com
11. M. Xinghua Wang, B. Wang, “Liquid Crystal On Silicon (LCoS) spatial light modulator data sheets and technical details,” private communication of Liquid Crystal Institute, Kent State University, 2003
12. X. Wang, B. Wang, P. J. Bos, J. E. Anderson, J. J. Pouch, and F. A. Miranda, “Finite-difference time-domain simulation of a liquid-crystal optical phased array,” J. Opt. Soc. Am. A 22, 346-354, (2005)
13. J. Kacperski, M. Kujawinska, X. Wang, P. J. Bos, “Active microinterferometer with liquid crystal on silicon (LCoS) for extended range static and dynamic micromembrane measurement,” in Interferometry XII: Applications, W. Osten and E. Novak, eds., Proc. SPIE 5532, 37-43, (2004)
14. A. Styk, K. Patorski, “Identification of nonlinear recording error in phase shifting interferometry,” Opt. Lasers Eng. (to be published)
15. A. Sabac, C. Gorecki, M. Jozwik, T. Dean, A. Jacobelli, “Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization,” in Optical Micro- and Nanometrology in Manufacturing Technology, C. Gorecki and A. K. Asundi, eds., Proc. SPIE 5458, 141-146, (2004)
16. J. Kacperski, M. Kujawinska, J. Krezel, “Modified linear and circular carrier frequency Fourier transform method applied for studies of vibrating microelements,” in Optical Micro- and Nanometrology in Manufacturing Technology, C. Gorecki and A. K. Asundi, eds., Proc. SPIE 5458, 287-298, (2004)
17. S. Petitgrand, R. Yahiaoui, A. Bosseboeuf, K. Danaie, “Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization,” in Microsystems Engineering: Metrology and Inspection, C. Gorecki, W. P. Jueptner, M. Kujawinska, eds., Proc. SPIE 4400, 51-60, (2001)