Smart pixel camera based signal processing in an interferometric test station for massive parallel inspection of MEMS and MOEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7387, Issue , 2010, Pages

  Styk, Adam ^a   Lambelet, Patrick ^b   Røyset, Arne ^c   Kujawińska, Małgorzata ^a   Gastinger, Kay ^c  

^a Institute of Micromechanics and Photonics   (Poland)

^b Heliotis Inc   (Switzerland)

^c SINTEF   (Norway)

Author keywords

interferometric signal processing; laser inteferometry; Low coherence interferometry; M(O)EMS testing

Indexed keywords

BASIC IDEA; ELECTRO-OPTICAL; ELECTROOPTICAL DETECTION; IMAGERS; IMAGING PLANE; INSPECTION SYSTEM; INTERFERENCE SIGNAL; INTERFEROMETRIC SIGNALS; LASER INTERFEROMETER; LOW COHERENCE INTERFEROMETRY; M(O)EMS TESTING; OPTICAL INTERFEROMETER; OPTICAL PROBING; PHASE-SHIFTING; PROCESSING CAPACITIES; PROCESSING PATHS; RESONANCE FREQUENCIES; SHAPE AND DEFORMATION MEASUREMENTS; SIGNAL DEMODULATION; SMART PIXELS; SPATIAL MODE DISTRIBUTION; TEST STATION;

CAMERAS; DATA PROCESSING; DATA REDUCTION; INSPECTION; INTERFEROMETERS; LASER INTERFEROMETRY; OPTICAL DESIGN; OPTICAL SYSTEMS; RESONANCE; SIGNAL PROCESSING; SPECKLE; VIBRATION ANALYSIS; WAVE INTERFERENCE;

PIXELS;

EID: 78049382521     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.871522     Document Type: Conference Paper

References (14)

1. Osten W., [Optical inspection of Microsystems], Taylor and Francis, New York, (2006).
2. Robinson D.W., Reid G., [Interferogram Analysis: Digital Fringe Pattern Measurement], Institute of Physics, Bristol, (1993).
3. Gastinger K., Kujawinska M., Løvhaugen O., Beer S., Gorecki C., Zeitner U., "SMARTIEHS - Smart inspection system for high-speed and multifunctional testing of MEMS and MOEMS," 14th Micro Optics Conference 2008, Brussels, Belgium, (2008).
4. Gastinger K., et al., "Next-generation test equipment for micro-production," Proc. SPIE 7718, 77180F, (2010).
5. Beer S. [Real-time photon-noise limited optical coherence tomography based on pixel-level analog signal processing], PhD dissertation, University of Neuchâtel, Neuchâtel, (2006).
6. Beer S., Zeller P., Blanc N., Lustenberger F., Seitz P., "Smart pixels for real-time optical coherence tomography,", Proc. SPIE 5302, 21-32, (2004).
7. Kilpatrick J.M, Markov V., "Matrix laser vibrometer for transient modal imaging and rapid nondestructive testing," Proc. SPIE 7098, 709809, (2008).
8. Ellinsgrud S., Løkberg O.J., Pedersen H.M., "Recording and analysis of (high frequency) sinusoidal vibrations using computerized TV-holography," Proc. SPIE 1399, 30-41, (1990).
9. Drexler W., Fujimoto J.G. [Optical Coherence Tomography. Technology and Applications], Springer-Verlag, Berlin Heidelberg, (2008).
10. Takada K., Yokohama I., Chida K., Noda J., Appl. Opt. 26, 1603-1606, (1987).
11. Youngquist R., Carr S., Davies D., Opt. Lett. 12, 158-160, (1987).
12. Hariharan, P., [Optical Interferometry], 2nd ed., Academic Press, Elsevier, Amsterdam, (2003).
13. Sandoz, P., Tribillon, G., and Perrin H., "High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms," J. Mod. Opt., 43, 701-708, (1996).
14. de Groot, P., "Determination of fringe order in white light interference microscopy," Appl. Opt. 41, 4571-4578, (2002).