Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7389, Issue , 2009, Pages

  Gastinger, Kay ^a   Haugholt, Karl Henrik ^a   Kujawinska, Malgorzata ^b   Jozwik, Michal ^b   Schaeffel, Christoph ^c   Beer, Stephan ^d  

^a SINTEF   (Norway)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c IMMS   (Germany)

^d CSEM   (Switzerland)

Author keywords

Laser interferometry; Low coherence interferometry; MEMS testing; Micro optics; Smart pixel camera

Indexed keywords

BASIC IDEA; ELECTRO-OPTICAL; INSPECTION SYSTEM; INTERFEROMETER ARRAYS; LASER INTERFEROMETER; LOW COHERENCE INTERFEROMETRY; LOW-COHERENCE; MEASUREMENT RESULTS; MECHANICAL DESIGN; MEMS TESTING; OPTICAL INTERFEROMETER; OPTICAL PROBING; SCANNING SYSTEMS; SINGLE CHANNELS; SMART PIXEL CAMERA; STANDARD TESTS; TEST STATION;

CAMERAS; DATA REDUCTION; FILLERS; INSPECTION; LASER INTERFEROMETRY; LASERS; MAGNETIC SUSCEPTIBILITY; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DATA PROCESSING; OPTICAL DESIGN; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT; PIXELS; WAVE INTERFERENCE;

INTERFEROMETERS;

EID: 69949124328     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.828162     Document Type: Conference Paper

References (8)

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