Polymer micromachined multimodal tactile sensors

Sensors and Actuators, A: Physical

Volumn 117, Issue 1, 2005, Pages 50-61

  Engel, Jonathan ^a   Chen, Jack ^a   Fan, Zhifang ^a   Liu, Chang ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Hardness; Polyimide; Sensor skin; Tactile; Thermal conductivity

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYMERS; REAL TIME SYSTEMS; ROBOTICS; THERMAL CONDUCTIVITY;

FORCE SENSITIVE RESISTORS (FSR); SENSING FLOW; SENSOR SKINS; SIGNAL PROCESSING ELECTRONICS;

SENSORS;

EID: 9644264129     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.05.037     Document Type: Article

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