Structure and chemistry of the Si(111)/AlN interface

Applied Physics Letters

Volumn 100, Issue 1, 2012, Pages

  Radtke, G ^a   Couillard, M ^b   Botton, G A ^c   Zhu, D ^d   Humphreys, C J ^d  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b MCMASTER UNIVERSITY   (Canada)

^c MCMASTER UNIVERSITY   (Canada)

^d UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALN FILMS; AMORPHOUS REGIONS; CRYSTALLINE INTERFACES; EXPERIMENTAL OBSERVATION; GROWTH CONDITIONS; HETEROGENEOUS INTERFACES; HIGH-ANGLE ANNULAR DARK FIELDS; INTERLAYER FORMATION; LOW TEMPERATURES; SI (1 1 1);

ELECTRON ENERGY LOSS SPECTROSCOPY; INTERFACES (MATERIALS); SILICON NITRIDE;

CRYSTAL ATOMIC STRUCTURE;

EID: 84855557815     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3674984     Document Type: Article

References (12)

1. G. Radtke, M. Couillard, G. A. Botton, D. Zhu, and C. J. Humphreys, Appl. Phys. Lett. 97, 251901 (2010). 10.1063/1.3527928
2. D. Xi, Y. Zheng, P. Chen, Z. Zhao, P. Chen, S. Xie, B. Shen, S. Gu, and R. Zhang, Phys. Status Solidi A 191, 137 (2002). 10.1002/1521-396X(200205)191: 1<>1.0.CO;2-N
3. S.-J. Lee, S.-H. Jang, S.-S. Lee, and C.-R. Lee, J. Cryst. Growth 249, 65 (2003). 10.1016/S0022-0248(02)02100-0
4. M.-H. Kim, Y.-C. Bang, N.-M. Park, C.-J. Choi, T.-Y. Seong, and S.-J. Park, Appl. Phys. Lett. 78, 2858 (2001). 10.1063/1.1371539
5. S. Kaiser, M. Jakob, J. Zweck, W. Gebhardt, O. Ambacher, R. Dimitrov, A. T. Schremer, J. A. Smart, and J. R. Shealy, J. Vac. Sci. Technol. B 18, 733 (2000). 10.1116/1.591268
6. S. Tanaka, Y. Kawaguchi, N. Sawaki, M. Hibino, and K. Hiramatsu, Appl. Phys. Lett. 76, 2701 (2000). 10.1063/1.126448
7. R. Liu, F. A. Ponce, A. Dadgar, and A. Krost, Appl. Phys. Lett. 83, 860 (2003). 10.1063/1.1597749
8. A. Bourret, A. Barski, J. L. Rouvire, G. Renaud, and A. Barbier, J. Appl. Phys. 83, 2003 (1998). 10.1063/1.366929
9. K. Y. Zang, L. S. Wang, S. J. Chua, and C. V. Thompson, J. Cryst. Growth 268, 515 (2004). 10.1016/j.jcrysgro.2004.04.083
10. G. P. Dimitrakopulos, A. M. Sanchez, P. Komninou, T. Kehagias, T. Karakostas, G. Nouet, and P. Ruterana, Phys. Status Solidi B 242, 1617 (2005). 10.1002/pssb.v242:8
11. Handbook of Chemistry and Physics 2008-2009, 89th ed., edited by, D. R. Lide, (CRC, Boca Raton, FL, 2008).
12. R. F. Egerton, Electron Energy Loss Spectroscopy in the Electron Microscope, 3rd ed. (Springer, New York, 2011).