Mechano-optical switching in a MEMS integrated photonic crystal slab waveguide

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 9-12

  Abdulla, S M C ^a   Kauppinen, L J ^a   Dijkstra, M ^a   Berenschot, E ^a   De Boer, M J ^a   De Ridder, R M ^a   Krijnen, G J M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BIMORPH CANTILEVER; DEEP-UV LITHOGRAPHY; ELECTROSTATIC ACTUATION; INTEGRATED MEMS; INTERACTION LENGTH; MEMS INTEGRATED; MICROMACHING; MONOLITHICALLY INTEGRATED; OPTICAL SWITCHING; OPTOMECHANICAL; PHOTONIC CRYSTAL-SLAB WAVEGUIDES; SELF-ALIGNED; TELECOMMUNICATION WAVELENGTHS;

ELECTROSTATIC ACTUATORS; INTEGRATION; LIGHT TRANSMISSION; MECHANICAL ENGINEERING; MECHANICS; MONOLITHIC INTEGRATED CIRCUITS; NANOCANTILEVERS; PHOTONIC CRYSTALS; REACTIVE ION ETCHING; TELECOMMUNICATION EQUIPMENT; WAVEGUIDES;

MEMS;

EID: 79953781062     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734349     Document Type: Conference Paper

References (12)

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