A wide wavelength range optical switch using a flexible photonic crystal waveguide and silicon rods

Journal of Micromechanics and Microengineering

Volumn 20, Issue 7, 2010, Pages

  Takahata, Tomoyuki ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR HOLES; AT-WAVELENGTH; CENTRAL AXIS; INDUCTIVE COUPLED PLASMA REACTIVE ION ETCHINGS; PHOTONIC CRYSTAL WAVEGUIDE; SILICON RODS; SINGLE CHIPS; SINGLE-MASK; THREE-STEP PROCESS; TWO-DIMENSIONAL PHOTONIC CRYSTALS; WAVELENGTH RANGES;

ELECTRON BEAMS; FINITE DIFFERENCE TIME DOMAIN METHOD; HYDROFLUORIC ACID; OPTICAL SWITCHES; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; TWO DIMENSIONAL; WAVEGUIDES;

PHOTONIC CRYSTALS;

EID: 77953880796     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/7/075009     Document Type: Article

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