Photonic crystal switch by inserting nano-crystal defects using MEMS actuator

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 107-108

  Kanamori, Y ^a   Inoue, K ^a   Horie, K ^a   Hane, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Actuators; Atom optics; Electron optics; Etching; Finite difference methods; Micromechanical devices; Optical switches; Photonic crystals; Silicon; Time domain analysis

Indexed keywords

ACTUATORS; CRYSTAL DEFECTS; DEFECTS; ELECTRON BEAM LITHOGRAPHY; ELECTRON OPTICS; ETCHING; FINITE DIFFERENCE METHOD; MICROACTUATORS; MOEMS; OPTICAL SWITCHES; PHOTONIC CRYSTALS; SILICON; TIME SWITCHES;

ATOM OPTICS; FABRICATION TECHNIQUE; FAST ATOM BEAM ETCHINGS; FDTD SIMULATIONS; GAS PHASE ETCHING; LIGHT SWITCHING; MICROMECHANICAL DEVICE; OPTICAL PARAMETER;

TIME DOMAIN ANALYSIS;

EID: 33644971985     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233489     Document Type: Conference Paper

References (2)

1. T. Baba, N. Fukaya and J. Yonekura, Electron. Lett. 35 (1999) 654.
2. S. G. Johnson, S. Fan, P. R. Villeneuve, J. D. Joannopoulos and L. A. Kolodziejski, Phys. Rev. B 60, (1999) 5751.