Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab

Electronics Letters

Volumn 45, Issue 12, 2009, Pages 581-582

  Dumon, P ^a   Bogaerts, W ^a   Baets, R ^a   Fedeli, J M ^b   Fulbert, L ^b  

^a GHENT UNIVERSITY   (Belgium)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS TECHNOLOGY; DISRUPTIVE TECHNOLOGY; FABLESS; PHOTONIC FUNCTIONS; SERVICE PLATFORMS; SILICON PHOTONICS; SINGLE CHIPS; VOLUME FABRICATION; WAFER-SCALE;

CMOS INTEGRATED CIRCUITS; PHOTONIC DEVICES; PHOTONICS; SEMICONDUCTING SILICON COMPOUNDS; TECHNOLOGY TRANSFER;

SILICON WAFERS;

EID: 67149097776     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el.2009.1353     Document Type: Article

References (16)

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