Two-domain formation during the epitaxial growth of GaN (0001) on c-plane Al 2O 3 (0001) by high power impulse magnetron sputtering

Journal of Applied Physics

Volumn 110, Issue 12, 2011, Pages

  Junaid, M ^a   Lundin, D ^a   Palisaitis, J ^a   Hsiao, C L ^a   Darakchieva, V ^a   Jensen, J ^a   Persson, P O A ^a   Sandstrom P ^a   Lai, W J ^b   Chen, L C ^b   Chen, K H ^b,c   Helmersson, U ^a   Hultman, L ^a   Birch, J ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BAND EDGE LUMINESCENCE; DOMAIN BOUNDARY; EXTENDED DEFECT; HIGH-POWER; HIGH-POWER PULSE; LOW TEMPERATURES; MAGNETRON SPUTTER EPITAXY; MICRO-RAMAN; MICROPHOTOLUMINESCENCE; ROCKING CURVES; SPUTTERING POWER; STRAIN COMPONENTS; STRUCTURAL AND OPTICAL PROPERTIES;

EPITAXIAL FILMS; FULL WIDTH AT HALF MAXIMUM; GALLIUM NITRIDE; ION BOMBARDMENT; OPTICAL PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

EPITAXIAL GROWTH;

EID: 84855332740     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3671560     Document Type: Article

References (31)

1. S. C. Jain, M. Willander, J. Naryan, and R. Van Overstraeten, J. Appl. Phys. 87, 3 (2000). 10.1063/1.371971
2. M. S. Shur and R. F. Davis, GaN-Based Materials and Devices (World Scientific, Singapore, 2004).
3. R. Quay, Gallium Nitride Electronics (Springer-Verlag, Berlin, 2008).
4. S. Nakamura, Science 281, 956 (1998). 10.1126/science.281.5379.956
5. P. Waltereit, O. Brandt, A. Trampert, H. T. Grahn, J. Menniger, M. Ramsteiner, M. Reiche, and K. H. Ploog, Nature (London) 406, 865 (2000). 10.1038/35022529 (Pubitemid 30664256)
6. J. Wu, J. Appl. Phys. 106, 011101 (2009). 10.1063/1.3155798
7. D. Ehrentraut and Z. Sitar, MRS Bull. 34, 259 (2009). 10.1557/mrs2009.76
8. O. Ambacher, J. Phys. D: Appl. Phys. 31, 2653 (1998). 10.1088/0022-3727/31/20/001
9. M. Junaid, C.-L. Hsiao, J. Palisaitis, J. Jensen, P. O.. Persson, L. Hultman, and J. Birch, Appl. Phys. Lett. 98, 141915 (2011). 10.1063/1.3576912
10. J. Bohlmark, M. Lattemann, J. T. Gudmundsson, P. A. Ehiasarian, Y. Aranda Gonzalvo, N. Brenning, and U. Helmersson, Thin Solid Films 515, 1522 (2006). 10.1016/j.tsf.2006.04.051 (Pubitemid 44716061)
11. M. Samuelsson, D. Lundin, J. Jensen, M. A. Raadu, J. T. Gudmundsson, and U. Helmersson, Surf. Coat. Technol. 205, 591 (2010). 10.1016/j.surfcoat.2010.07. 041
12. V. Kouznetsov, K. Mack, J. M. Schneider, U. Helmersson, and I. Petrov, Surf. Coat. Technol. 122 290 (1999). 10.1016/S0257-8972(99)00292-3
13. E. Wallin and U. Helmersson, Thin Solid Films 516, 6398 (2008). 10.1016/j.tsf.2007.08.123
14. J. Whitlow, G. Possnert, and C. S. Petersson, Nucl. Instrum. Methods Phys. Res. B 27, 448 (1987). 10.1016/0168-583X(87)90527-1
15. M. S. Janson, CONTES, Conversion of Time-Energy Spectra, a program for ERDA data analysis. Internal Report, Uppsala University, 2004).
16. C.-L. Hsiao, L.-W. Tu, T.-W. Chi, M. Chen, T.-F. Young, C.-T. Chia, and Y.-M. Chang, Appl. Phys. Lett. 90, 043102 (2007). 10.1063/1.2433034 (Pubitemid 46184676)
17. S. Dhara, C. R. Das, H. C. Hsu, B. Raj, A. K. Bhaduri, L. C. Chen, K. H. Chen, S. K. Albert, and A. Ray, Appl. Phys. Lett. 92, 143114 (2008). 10.1063/1.2907851 (Pubitemid 351535648)
18. T. Seppänen, L. Hultman, and J. Birch, Appl. Phys. Lett. 89, 181928 (2006). 10.1063/1.2382746 (Pubitemid 44711501)
19. T. Metzger, R. Hopler, E. Born, O. Ambacher, M. Stutzmann, R. Stommer, M. Schuster, H. Gobel, S. Christiansen, M. Albrecht, and H. P. Stunk, Philos. Mag. A 77, 1013 (1998). 10.1080/01418619808221225
20. V. Darakchieva, B. Monemar, and A. Usui, Appl. Phys. Lett. 91, 031911 (2007). 10.1063/1.2753122 (Pubitemid 47120662)
21. J. M. Wagner and F. Bechstedt, Phys. Rev. B 66, 115202 (2002). 10.1103/PhysRevB.66.115202
22. M. Yamaguchi, T. Yagi, T. Azuhata, T. Sota, K. Suzuki, S. Chichibu, and S. Nakamura, J. Phys.: Condens. Matter 9, 241 (1997). 10.1088/0953-8984/9/1/025
23. C. Kisielowski, J. Krüger, S. Ruvimov, T. Suski, J. W. Ager III, E. Jones, Z. Liliental-Weber, M. Rubin, and E. R. Weber, Phys. Rev. B 54, 17745 (1996). 10.1103/PhysRevB.54.17745
24. C. G. Van de Walle, Phys. Rev. B 68, 165209 (2003). 10.1103/PhysRevB.68. 165209
25. V. Yu. Davydov, Yu. E. Kitaev, I. N. Goncharuk, A. N. Smirnov, J. Graul, O. Semchinova, D. Uffmann, M. B. Smirnov, A. P. Mirgorodsky, and R. A. Evarestov, Phys. Rev. B 58, 12899 (1998). 10.1103/PhysRevB.58.12899
26. L. Bergman, D. Alexson, P. L. Murphy, R. J. Nemanich, M. Dutta, M. A. Stroscio, C. Balkas, H. Shin, and R. F. Davis, Phys. Rev. B 59, 12977 (1999). 10.1103/PhysRevB.59.12977
27. V. Darakchieva, T. Paskova, M. Schubert, H. Arwin, P. P. Paskov, B. Monemar, D. Hommel, J. Off, F. Scholz, M. Heuken, B. A. Haskell, P. T. Fini, S. J. Speck, and S. Nakamura, Phys. Rev. B 75, 195217 (2007). 10.1103/PhysRevB.75. 195217
28. I. Petrov, L. Hultman, U. Helmersson, J.-E. Sundgren, and J. E. Greene, Thin Solid Films 169, 299 (1989). 10.1016/0040-6090(89)90713-X
29. D. Lundin, P. Larsson, E. Wallin, M. Lattemann, N. Brenning, and U. Helmersson, Plasma Sources Sci. Technol. 17, 035021 (2008). 10.1088/0963-0252/ 17/3/035021
30. M. Ohring, Materials Science of Thin Films: Deposition and Structure, 2nd ed. (Academic, San Diego, CA, 2002).
31. A. Reshchikov and H. Morkoc, J. Appl. Phys. 97, 061301 (2005). 10.1063/1.1868059 (Pubitemid 40833704)