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Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study

(10) Tiron, Raluca a Chevalier, Xavier a Couderc, Christophe a Pradelles, Jonathan a Bustos, Jessy a Pain, Laurent a Navarro, Christophe b Magnet, Stephanie b Fleury, Guillaume c Hadziioannou, Georges c

a CEA LETI (France)

b ARKEMA (France)

c UNIVERSITÉ BORDEAUX 1 (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; CRYSTALLOGRAPHY; CYLINDERS (SHAPES); ESTERS; POLYMETHYL METHACRYLATES; POLYSTYRENES; SELF ASSEMBLY; TRIANGULATION;

BLOCK COPOLYMER SELF-ASSEMBLY; DELAU-NAY TRIANGULATIONS; DIRECTED SELF-ASSEMBLY; HYDROGEN-SILESQUIOXANE; LARGE-SCALE INDUSTRIAL PROCESS; POLYSTYRENE-B-POLY(METHYL METHACRYLATE); SELF ASSEMBLY PROCESS; THERMODYNAMIC MECHANISM;

BLOCK COPOLYMERS;

EID: 84255172693 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3659714 Document Type: Article

Times cited : (36)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.