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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 29, Issue 6, 2011, Pages

Nanofabrication down to 10 nm on a plastic substrate

(3) Tao, Li a Lee, Jongho a Akinwande, Deji a

a The University of Texas at Austin (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLOCK COPOLYMERS; FABRICATION; FIELD EFFECT TRANSISTORS; FLEXIBLE ELECTRONICS; GRAPHENE; NANOTECHNOLOGY; POLYETHYLENE TEREPHTHALATES; POLYIMIDES;

CHANNEL LENGTH; DENSE GRATINGS; DIRECTED SELF-ASSEMBLY; E-BEAM LITHOGRAPHY; ELECTRONIC PROCESSING; FABRICATION PROCESS; FABRICATION TECHNIQUE; HIGH MOBILITY; KAPTON FILMS; NANO-SCALE MATERIALS; PLASTIC SUBSTRATES; POLYIMIDE SUBSTRATE; SUB-100 NM; SUBSTRATE MATERIAL;

SUBSTRATES;

EID: 84255168507 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3662081 Document Type: Article

Times cited : (17)

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