Spectroscopic characterization of plasmas generated by ECR microwave discharge of N 2 gas and pulsed laser ablation of a B 4C target

Plasma Processes and Polymers

Volumn 8, Issue 12, 2011, Pages 1146-1153

  Feng, Hui ^a   Sun, Jian ^a   Ding, Dayu ^a   Xu, Ning ^a   Ying, Zhifeng ^a   Wu, Jiada ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

electron cyclotron resonance; films; gas phase reaction; laser ablation; microwave discharge; optical emission spectroscopy; reactive expansion

Indexed keywords

ECR MICROWAVE; ECR NITROGEN PLASMA; EMISSION BANDS; EMISSION LINES; GAS-PHASE REACTION; GAS-PHASE REACTIONS; MICROWAVE DISCHARGE; MOLECULAR IONS; NITROGEN MOLECULE; OPTICAL EMISSIONS; PLASMA EMISSION; PULSED-LASER ABLATION; RAPID VARIATION; SPECTROSCOPIC CHARACTERIZATION;

ABLATION; BORON; BORON COMPOUNDS; CYCLOTRONS; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; EXPANSION; FILMS; GAS EMISSIONS; LASER ABLATION; LIGHT EMISSION; NITROGEN; NITROGEN PLASMA; OPTICAL EMISSION SPECTROSCOPY; PHASE INTERFACES; PULSED LASERS;

ELECTRIC DISCHARGES;

EID: 83455172401     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.201100115     Document Type: Article

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