Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy

IET Nanobiotechnology

Volumn 5, Issue 4, 2011, Pages 108-113

  Wang, Z ^a,b   Wang, D ^a,b   Jiao, N ^a   Tung, S ^c   Dong, Z ^a  

^a SHENYANG INSTITUTE OF AUTOMATION   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c University of Arkansas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM NANOLITHOGRAPHY; ALL-DIAMOND PROBES; ANODIC BONDING; CONTINUOUS FLOWS; CROSS SECTIONAL AREA; DC ELECTRIC FIELD; FABRICATION PROCESS; FLUORESCEIN ISOTHIOCYANATE; MICRO-SCALES; NANO CHANNELS; NANOBEADS; OXIDE SURFACE; SHARP INCREASE; SILICON CHIP; TRANSVERSE ELECTRICAL; VACUUM CHAMBERS;

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; ELECTRODES; ETHANOL; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOLITHOGRAPHY; NANOSTRUCTURED MATERIALS; SILICON OXIDES;

FABRICATION;

FLUORESCEIN ISOTHIOCYANATE; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; ELECTRODE; EQUIPMENT DESIGN; INSTRUMENTATION; METHODOLOGY; MICROCHIP ANALYSIS; MICROELECTROMECHANICAL SYSTEM; NANOTECHNOLOGY; POROSITY;

ELECTRODES; EQUIPMENT DESIGN; FLUORESCEIN-5-ISOTHIOCYANATE; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MICROCHIP ANALYTICAL PROCEDURES; MICROSCOPY, ATOMIC FORCE; NANOTECHNOLOGY; POROSITY; SILICON;

EID: 82955242525     PISSN: 17518741     EISSN: None     Source Type: Journal    
DOI: 10.1049/iet-nbt.2011.0007     Document Type: Conference Paper

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