Reduction of leakage currents with nanocrystals embedded in an amorphous matrix in metal-insulator-metal capacitor stacks

Applied Physics Letters

Volumn 99, Issue 22, 2011, Pages

  Krause, A ^a   Weber, W M ^a   Schroder U ^a   Pohl, D ^b   Rellinghaus, B ^b   Heitmann, J ^c   Mikolajick, T ^a,d  

^a NAMLAB GGMBH   (Germany)

^b IFW DRESDEN   (Germany)

^c TU BERGAKADEMIE FREIBERG   (Germany)

^d DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATRICES; CONDUCTION MECHANISM; CRYSTALLINITIES; DEGREE OF CRYSTALLINITY; K-VALUE; K-VALUES; METAL-INSULATOR-METAL CAPACITORS; RADIO-FREQUENCY-MAGNETRON SPUTTERING; SELECTIVE GROWTH;

CAPACITORS; CRYSTALLITES; METAL INSULATOR BOUNDARIES; METALS; MIM DEVICES; PLATINUM; SEMICONDUCTOR INSULATOR BOUNDARIES; TRANSMISSION ELECTRON MICROSCOPY;

LEAKAGE CURRENTS;

EID: 82955213935     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3664395     Document Type: Article

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