Oxidation resistance of nanocomposite CrAlSiN under long-time heat treatment

Surface and Coatings Technology

Volumn 206, Issue 7, 2011, Pages 1571-1576

  Chen, Hsien Wei ^a   Chan, Yu Chen ^a   Lee, Jyh Wei ^b   Duh, Jenq Gong ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

CrAlSiN; Nanocomposite; Oxidation resistance; Structure stability

Indexed keywords

AFM; AFTER-HEAT TREATMENT; CRALSIN; CRALSIN COATING; DIFFUSION PATHS; ELEVATED TEMPERATURE; GRAIN SIZE; OUTWARD DIFFUSION; OXIDATION BEHAVIORS; OXIDE LAYER; OXYGEN PENETRATION; RF-MAGNETRON SPUTTERING; SEM IMAGE; SI CONTENT; SILICON CONTENTS; SILICON DOPING; STRUCTURE STABILITY;

DIFFUSION COATINGS; GRAIN SIZE AND SHAPE; HEAT RESISTANCE; HEAT TREATMENT; MAGNETRON SPUTTERING; NANOCOMPOSITE FILMS; NANOCOMPOSITES; OXIDATION; OXIDATION RESISTANCE; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DOPING; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

SILICON WAFERS;

EID: 82755160992     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.06.009     Document Type: Article

References (32)

1. Veprek S., Veprek-Heijman M.G.J., Karvankova P., Prochazka J. Thin Solid Films 2005, 476:1.
2. Mitterer C., Holler F., Ustel F., Heim D. Surf. Coat. Technol. 2000, 125:233.
3. Gekoonde H.O., Subramanian S.V. Surf. Coat. Technol. 2002, 149:151.
4. Sandstrom D.R., Hodowany J.N. Mach. Sci. Technol. 1988, 22:343.
5. Lee J.W., Duh J.G., Ching C.H., Chen Y.C. Surf. Coat. Technol. 2004, 188:655.
6. Lin C.H., Duh J.G., Yeh J.W. Surf. Coat. Technol. 2007, 201:6304.
7. Lin C.H., Duh J.G. Surf. Coat. Technol. 2008, 203:558.
8. Park J.H., Chung W.S., Cho Y.R., Kim K.H. Surf. Coat. Technol. 2004, 188-189:425.
9. Park I.W., Kang D.S., Moore J.J., Kwon S.C., Rha J.J., Kim K.H. Surf. Coat. Technol. 2007, 201:5223.
10. Tien S.K., Duh J.G., Lee J.W. Surf. Coat. Technol. 2007, 201:5138.
11. Reiter A.E., Mitterer C., Sartory B. J. Vac. Sci. Technol. A 2007, 25:711.
12. Zhu M., Li M.S., Zhou Y.C. Surf. Coat. Technol. 2006, 201:2878.
13. Lin J., Mishra B., Moore J.J., Sproul W.D. Surf. Coat. Technol. 2008, 202:3272.
14. Reiter A.E., Derflinger V.H., Hanselmann B., Bachmann T., Sartory B. Surf. Coat. Technol. 2005, 200:2114.
15. Thobor-Keck A., Lapostolle F., Dehlinger A.S., Pilloud D., Pierson J.F., Coddet C. Surf. Coat. Technol. 2005, 200:264.
16. Hu X.P., Han Z.H., Li G.Y., Gu M.Y. J. Vac. Sci. Technol. A 2002, 20:1921.
17. Rebouta L., Tavares C.J., Aimo R., Wang Z., Pischow K., Alves E., Rojas T.C., Odriozola J.A. Surf. Coat. Technol. 2000, 133-134:234.
18. Veprek S., Haussmann M., Reiprich S., Li S.Z., Dian J. Surf. Coat. Technol. 1996, 86-87:394.
19. Park I.W., Choi S.R., Lee M.H., Kim K.H. J. Vac. Sci. Technol. A 2003, 21(4):895.
20. Tien S.K., Lin C.H., Tsai Y.Z., Duh J.G. Surf. Coat. Technol. 2007, 202:735.
21. Tien S.K., Lin C.H., Tsai Y.Z., Duh J.G. Key Eng. Mater. 2008, 373:446.
22. Tsai S.H., Duh J.G. Thin Solid Films 2009, 518:1480.
23. Chang Y.Y., Chang C.P., Wang D.Y., Yang S.M., Wu W. J. Alloy Compd. 2008, 461:336.
24. Chen H.W., Chan Y.C., Lee J.W., Duh J.G. Surf. Coat. Technol. 2010, 205:1189.
25. Lee D.B., Nguyen T.D., Kim S.K. Surf. Coat. Technol. 2009, 203:1199.
26. Veprek S., Karvankova P., Veprek-Heijman M.G.J. J. Vac. Sci. Technol. B 2005, 23:L17.
27. Oh U.C., Je J.H. J. Appl. Phys. 1993, 74:1692.
28. Je J.H., Noh D.Y., Kim H.K., Liang K.S. J. Appl. Phys. 1997, 81:6126.
29. Chekour L., Nouveau C., Chala A., Labidi C., Rouag N., Djouadi M.A. Surf. Coat. Technol. 2005, 200:241.
30. Gaskell D.R. Introduction to the Thermodynamics of Materials 2003, Taylor & Francis, New York. fourth ed.
31. Ichimura H., Kawana A. J. Mater. Res. 1993, 8:1093.
32. Ichimura H., Kawana A. J. Mater. Res. 1994, 9:151.