SCOPUS 정보 검색 플랫폼

Volumn 82, Issue 11, 2011, Pages

Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis

(9) Horiba, K a,b Nakamura, Y a Nagamura, N a Toyoda, S a Kumigashira, H a,b Oshima, M a,b Amemiya, K b,c Senba, Y d Ohashi, H d

a UNIVERSITY OF TOKYO (Japan)

b JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

c INSTITUTE OF MATERIALS STRUCTURE SCIENCE (Japan)

d JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCEPTANCE ANGLE; ANGULAR DEPENDENCE; BEAM LINES; CHEMICAL STATE ANALYSIS; DEPTH-PROFILE ANALYSIS; ELECTRON SPECTROMETER; ELECTRON SPECTROSCOPY FOR CHEMICAL ANALYSIS; FRESNEL ZONE PLATE; GATE PATTERNS; HIGH RESOLUTION; HIGH-RESOLUTION ANGLE-RESOLVED; MICROSCOPE SYSTEMS; NANO SCALE; NON DESTRUCTIVE; PHOTOELECTRON SPECTRUM; SPATIAL RESOLUTION; SPATIALLY RESOLVED; SPRING-8;

DEPTH PROFILING; ELECTRONIC STRUCTURE; ELECTRONS; PHOTOELECTRON SPECTROSCOPY; PHOTONS; SPECTROMETERS; THREE DIMENSIONAL; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL ANALYSIS;

ARTICLE; ELECTRON; INSTRUMENTATION; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY;

ELECTRONS; MICROSCOPY, ELECTRON, SCANNING; NANOTECHNOLOGY; SPECTRUM ANALYSIS;

EID: 82555173689 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3657156 Document Type: Article

Times cited : (62)

References (22)

1
- 0029387879
- 10.1063/1.1146167
- L. Casalis, W. Jark, M. Kiskinova, D. Lonza, P. Melpignano, D. Morris, R. Rosei, A. Savoia, A. Abrami, C. Fava, P. Furlan, R. Pugliese, D. Vivoda, G. Sandrin, F. Q. Wei, S. Contarini, L. DeAngelis, C. Gariazzo, P. Nataletti, and G. R. Morrison, Rev. Sci. Instrum. 66, 4875 (1995). 10.1063/1.1146167
- (1995) Rev. Sci. Instrum. , vol.66 , pp. 4875
- Casalis, L.¹ Jark, W.² Kiskinova, M.³ Lonza, D.⁴ Melpignano, P.⁵ Morris, D.⁶ Rosei, R.⁷ Savoia, A.⁸ Abrami, A.⁹ Fava, C.¹⁰ Furlan, P.¹¹ Pugliese, R.¹² Vivoda, D.¹³ Sandrin, G.¹⁴ Wei, F.Q.¹⁵ Contarini, S.¹⁶ Deangelis, L.¹⁷ Gariazzo, C.¹⁸ Nataletti, P.¹⁹ Morrison, G.R.²⁰ more..

2
- 0003011430
- 10.1016/S0368-2048(97)00010-8
- M. Marsi, L. Casalis, L. Gregoratti, S. Genther, A. Kolmakov, J. Kovac, D. Lonza, and M. Kiskinova, J. Electron Spectrosc. Relat. Phenom. 84, 73 (1997). 10.1016/S0368-2048(97)00010-8
- (1997) J. Electron Spectrosc. Relat. Phenom. , vol.84 , pp. 73
- Marsi, M.¹ Casalis, L.² Gregoratti, L.³ Genther, S.⁴ Kolmakov, A.⁵ Kovac, J.⁶ Lonza, D.⁷ Kiskinova, M.⁸

3
- 0032398995
- 10.1107/S0909049597014283
- T. Warwick, H. Ade, S. Cerasari, J. Delinger, K. Franck, A. Garcia, S. Hayakawa, A. Hitchcock, J. Kikuma, S. Klingler, J. Kortright, G. Morisson, M. Moronne, E. Rightor, E. Rotenberg, S. Seal, H. J. Shin, W. F. Steele, and B. P. Tonner, J. Synchrotron Radiat. 5, 1090 (1998). 10.1107/S0909049597014283
- (1998) J. Synchrotron Radiat. , vol.5 , pp. 1090
- Warwick, T.¹ Ade, H.² Cerasari, S.³ Delinger, J.⁴ Franck, K.⁵ Garcia, A.⁶ Hayakawa, S.⁷ Hitchcock, A.⁸ Kikuma, J.⁹ Klingler, S.¹⁰ Kortright, J.¹¹ Morisson, G.¹² Moronne, M.¹³ Rightor, E.¹⁴ Rotenberg, E.¹⁵ Seal, S.¹⁶ Shin, H.J.¹⁷ Steele, W.F.¹⁸ Tonner, B.P.¹⁹

4
- 0003144688
- Performance of the SRRC scanning photoelectron microscope
- DOI 10.1016/S0168-9002(01)00516-2, PII S0168900201005162
- I.-H. Hong, T.-H. Lee, G.-C. Yin, D.-H. Wei, J.-M. Juang, T.-E. Dann, R. Klauser, T. J. Chuang, C. T. Chen, and K.-L. Tsang, Nucl. Instrum. Methods Phys. Res. A 467, 905 (2001). 10.1016/S0168-9002(01)00516-2 (Pubitemid 33732213)
- (2001) Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , vol.467-468 , Issue.PART II , pp. 905-908
- Hong, I.-H.¹ Lee, T.-H.² Yin, G.-C.³ Wei, D.-H.⁴ Juang, J.-M.⁵ Dann, T.-E.⁶ Klauser, R.⁷ Chuang, T.J.⁸ Chen, C.T.⁹ Tsang, K.-L.¹⁰

5
- 0038968427
- 10.1063/1.1370563
- M. K. Lee and H. J. Shin, Rev. Sci. Instrum. 72, 2605 (2001). 10.1063/1.1370563
- (2001) Rev. Sci. Instrum. , vol.72 , pp. 2605
- Lee, M.K.¹ Shin, H.J.²

6
- 0001433505
- Scanning soft X-ray spectromicroscopy at the Pohang Light Source: Commissioning results
- DOI 10.1016/S0168-9002(01)00517-4, PII S0168900201005174
- H. J. Shin and M. K. Lee, Nucl. Instrum. Methods Phys. Res. A 467, 909 (2001). 10.1016/S0168-9002(01)00517-4 (Pubitemid 33732214)
- (2001) Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , vol.467-468 , Issue.PART II , pp. 909-912
- Shin, H.-J.¹ Lee, M.K.²

7
- 0000295124
- 10.1063/1.1142706
- B. P. Tonner, G. R. Harp, S. F. Koranda, and J. Zhang, Rev. Sci. Instrum. 63, 564 (1992). 10.1063/1.1142706
- (1992) Rev. Sci. Instrum. , vol.63 , pp. 564
- Tonner, B.P.¹ Harp, G.R.² Koranda, S.F.³ Zhang, J.⁴

8
- 79952166694
- 10.1149/1.3481610
- M. Oshima, S. Toyoda, H. Kamada, T. Tanimura, Y. Nakamura, K. Horiba, and H. Kumigashira, ECS Trans. 33, 231 (2010). 10.1149/1.3481610
- (2010) ECS Trans. , vol.33 , pp. 231
- Oshima, M.¹ Toyoda, S.² Kamada, H.³ Tanimura, T.⁴ Nakamura, Y.⁵ Horiba, K.⁶ Kumigashira, H.⁷

9
- 58449111632
- 10.1002/sia.2997
- S. Toyoda, J. Okabayashi, M. Oshima, G. L. Liu, Z. Liu, K. Ikeda, and K. Usuda, Surf. Interface Anal. 40, 1619 (2008). 10.1002/sia.2997
- (2008) Surf. Interface Anal. , vol.40 , pp. 1619
- Toyoda, S.¹ Okabayashi, J.² Oshima, M.³ Liu, G.L.⁴ Liu, Z.⁵ Ikeda, K.⁶ Usuda, K.⁷

10
- 79961173469
- 10.1016/j.nima.2010.12.242
- Y. Senba, S. Yamamoto, H. Ohashi, I. Matsuda, M. Fujisawa, A. Harasawa, T. Okuda, S. Takahashi, N. Nariyama, T. Matsushita, T. Ohata, Y. Furukawa, T. Tanaka, K. Takeshita, S. Goto, H. Kitamura, A. Kakizaki, and M. Oshima, Nucl. Instrum. Methods Phys. Res. A 649, 58 (2011). 10.1016/j.nima.2010.12.242
- (2011) Nucl. Instrum. Methods Phys. Res. A , vol.649 , pp. 58
- Senba, Y.¹ Yamamoto, S.² Ohashi, H.³ Matsuda, I.⁴ Fujisawa, M.⁵ Harasawa, A.⁶ Okuda, T.⁷ Takahashi, S.⁸ Nariyama, N.⁹ Matsushita, T.¹⁰ Ohata, T.¹¹ Furukawa, Y.¹² Tanaka, T.¹³ Takeshita, K.¹⁴ Goto, S.¹⁵ Kitamura, H.¹⁶ Kakizaki, A.¹⁷ Oshima, M.¹⁸

11
- 0036638645
- 10.1016/S0079-6816(02)00007-2
- S. Genther, B. Kaulich, L. Gregoratti, and M. Kiskinova, Prog. Surf. Sci. 70, 187 (2002). 10.1016/S0079-6816(02)00007-2
- (2002) Prog. Surf. Sci. , vol.70 , pp. 187
- Genther, S.¹ Kaulich, B.² Gregoratti, L.³ Kiskinova, M.⁴

12
- 0028444677
- 10.1016/0368-2048(93)02035-K
- A. K. Livesey and G. C. Smith, J. Electron Spectrosc. Relat. Phenom. 67, 439 (1994). 10.1016/0368-2048(93)02035-K
- (1994) J. Electron Spectrosc. Relat. Phenom. , vol.67 , pp. 439
- Livesey, A.K.¹ Smith, G.C.²

13
- 14744277369
- 2 on Si. VI. Evaluation of uncertainties in thickness measurement using XPS
- DOI 10.1002/sia.2020
- M. P. Seah, Surf. Interface Anal. 37, 300 (2005). 10.1002/sia.2020 (Pubitemid 40325420)
- (2005) Surface and Interface Analysis , vol.37 , Issue.3 , pp. 300-309
- Seah, M.P.¹

14
- 34548514420
- Influence of elastic scattering of photoelectrons on angle-resolved x-ray photoelectron spectroscopy
- DOI 10.1063/1.2772769
- K. Kimura, K. Nakajima, T. Conard, and W. Vandervorst, Appl. Phys. Lett. 91, 104106 (2007). 10.1063/1.2772769 (Pubitemid 47379095)
- (2007) Applied Physics Letters , vol.91 , Issue.10 , pp. 104106
- Kimura, K.¹ Nakajima, K.² Conard, T.³ Vandervorst, W.⁴

15
- 82555172937
- NIST Electron Effective Attenuation Length Database, Version 1.0, National Institute of Standards and Technology, Gaithersburg, MD
- C. J. Powell and A. Jablonski, NIST Electron Effective Attenuation Length Database, Version 1.0, National Institute of Standards and Technology, Gaithersburg, MD, 2001.
- (2001)
- Powell, C.J.¹ Jablonski, A.²

16
- 0028387002
- 10.1002/sia.740210302
- S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 21, 165 (1994). 10.1002/sia.740210302
- (1994) Surf. Interface Anal. , vol.21 , pp. 165
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

17
- 0003037887
- 10.1016/0368-2048(94)02270-4
- P. J. Cumpson, J. Electron Spectrosc. Relat. Phenom. 73, 25 (1995). 10.1016/0368-2048(94)02270-4
- (1995) J. Electron Spectrosc. Relat. Phenom. , vol.73 , pp. 25
- Cumpson, P.J.¹

18
- 0142026383
- 10.1063/1.1611272
- M. Oshima, S. Toyoda, T. Okumura, J. Okabayashi, H. Kumigashira, K. Ono, M. Niwa, K. Usuda, and N. Hirashita, Appl. Phys. Lett. 83, 2172 (2003). 10.1063/1.1611272
- (2003) Appl. Phys. Lett. , vol.83 , pp. 2172
- Oshima, M.¹ Toyoda, S.² Okumura, T.³ Okabayashi, J.⁴ Kumigashira, H.⁵ Ono, K.⁶ Niwa, M.⁷ Usuda, K.⁸ Hirashita, N.⁹

19
- 29344451971
- 2 at elevated temperatures in chlorine-based chemistry
- DOI 10.1116/1.2134707
- M. Helot, T. Chevolleau, L. Vallier, O. Joubert, E. Blanquet, A. Pisch, P. Mangiagalli, and T. Lill, J. Vac. Sci. Technol. A 24, 30 (2006). 10.1116/1.2134707 (Pubitemid 43006837)
- (2006) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.24 , Issue.1 , pp. 30-40
- Hlot, M.¹ Chevolleau, T.² Vallier, L.³ Joubert, O.⁴ Blanquet, E.⁵ Pisch, A.⁶ Mangiagalli, P.⁷ Lill, T.⁸

20
- 0942300080
- 10.1116/1.1627333
- L. Sha, R. Puthenkovilakam, Y.-S. Lin, and J. P. Chang, J. Vac. Sci. Technol. B 21 2420 (2003). 10.1116/1.1627333
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2420
- Sha, L.¹ Puthenkovilakam, R.² Lin, Y.-S.³ Chang, J.P.⁴

21
- 2142807339
- 10.1063/1.1689393
- S. Toyoda, J. Okabayashi, H. Kumigashira, M. Oshima, K. Ono, M. Niwa, K. Usuda, and G. L. Liu, Appl. Phys. Lett. 84, 2328 (2004). 10.1063/1.1689393
- (2004) Appl. Phys. Lett. , vol.84 , pp. 2328
- Toyoda, S.¹ Okabayashi, J.² Kumigashira, H.³ Oshima, M.⁴ Ono, K.⁵ Niwa, M.⁶ Usuda, K.⁷ Liu, G.L.⁸

22
- 24144441753
- 2 Si gate dielectrics by annealing in ultrahigh vacuum
- DOI 10.1063/1.1984091, 012903
- H. Takahashi, S. Toyoda, J. Okabayashi, H. Kumigashira, M. Oshima, Y. Sugita, G. L. Liu, Z. Liu, and K. Usuda, Appl. Phys. Lett. 87, 012903 (2005). 10.1063/1.1984091 (Pubitemid 41235298)
- (2005) Applied Physics Letters , vol.87 , Issue.1 , pp. 1-3
- Takahashi, H.¹ Toyoda, S.² Okabayashi, J.³ Kumigashira, H.⁴ Oshima, M.⁵ Sugita, Y.⁶ Liu, G.L.⁷ Liu, Z.⁸ Usuda, K.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.