Some aspects of microchannel heat transfer

Nano-Bio- Electronic, Photonic and MEMS Packaging

Volumn , Issue , 2010, Pages 431-477

  Joshi, Y ^a   Wei, X ^b   Dang, B ^b   Kota, K ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b IBM   (United States)

Author keywords

Electronics cooling; Experimental techniques; Flow boiling; Flow condensation; Heat transfer; Laser induced fluorescence; Micro PIV; Microchannel flows; Microfabrication; Numerical techniques; Stacked microchannels; Total internal reflection fluorescence; Two phase flow regimes; Two phase flows

Indexed keywords

EID: 81155127702     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-1-4419-0040-1_13     Document Type: Chapter

References (108)

1. Tuckerman D.B., R.F.W. Pease. High-performance heat sinking for VLSI. IEEE Electron Device Letters 1981; 2:126-129.
2. Wu P., W.A. Little. Measurement of friction factors for the flow of gases in very fine channels used for microminiature Joule-Thompson refrigerators. Cryogenics 1983; 23:273-277.
3. Pfahler J., J. Harley, H.H Bau, J. Zemel. Gas and Liquid Flow in Small Channels. Micromechanical Sensors, Actuators and Systems. ASME: New York, 1991.
4. Peng X.F., G.P. Peterson, B.X.Wang. Frictional flow characteristics of water flowing through rectangular microchannels. Experimental Heat Transfer 1994; 7:249-264.
5. Peng X.F., G.P. Peterson, B.X. Wang. Heat transfer characteristics of water flowing through rectangular microchannels. Experimental Heat Transfer 1994; 7:265-283.
6. Papautsky I., J. Brazzle, T. Ammel, A.B. Frazier. Laminar fluid behavior in microchannels using micropolar fluid theory. Sensors and Actuators 1999; 73:101-108.
7. Harms T.M., M.J. Kazmierczak F.M. Gerner. Developing convective heat transfer in deep rectangular microchannels. International Journal of Heat and Fluid Flow 1999; 210: 149-157.
8. Mala G.M., D. Li. Flow characteristics of water in microtubes. International Journal of Heat and Fluid Flow 1999; 20:142-148.
9. Mala G.M., D. Li, C. Werner, H.J. Jacobasch, Y.B. Ning. Flow characteristics of water through microchannels between two parallel plates with electrokinetic effects. International Journal of Heat and Fluid Flow 1997; 18:489-496.
10. Tso C. P., S.P Mahulikar. The use of the Brinkman number for single phase forced convective heat transfer in microchannels. International Journal of Heat and Mass Transfer 1998; 41:1759-1769.
11. Xu B., K.T. Ooi, N.T. Wong. Experimental investigation of flow friction for liquid flow in microchannels. International Communications in Heat and Mass Transfer 2000; 27: 1165-1176.
12. Qu W., I. Mudawar. Flow boiling heat transfer in two-phase micro-channel heat sinks - II. Annular two-phase flow model. International Journal of Heat and Mass Transfer 2002; 46:2773-2784.
13. Liu D., S.V. Garimella. Investigation of liquid flow in microchannels. Eighth AIAA/ASME Joint Thermophysics and Heat Transfer Conference 2002.
14. Lee P., S.V. Garimella. Experimental investigation of heat transfer in microchannels. ASME Summer Heat Transfer Conference 2003.
15. Kohl M.J., S.I. Abdel-Khalik, S.M. Jeter, D.L. Sadowski. An experimental investigation of microchannel flow with internal pressure measurements. International Journal of Heat and Mass Transfer 2005; 48:15518-1533.
16. Wei X., Y. Joshi. Experimental and numerical study of sidewall profile effects on flow and heat transfer inside microchannels. International Journal of Heat and Mass Transfer 2007; 50:4640-4651.
17. Wei X., Y. Joshi. Optimization study of stacked micro-channel heat sinks for microelectronic cooling. IEEE Transactions on Components and Packaging Technologies 2003; 26:55-61.
18. Phillips R.J. Micro-channel Heat Sinks: Advances in Thermal Modeling of Electronic Components and Systems. ASME: New York, 1990.
19. Muzychka Y.S., M.M. Yovanovich. Modeling friction factors in non-circular ducts for developing laminar flow. 2nd AIAA Theoretical Fluid Mechanics Meeting 1998.
20. Muzychka Y.S., M.M. Yovanovich. Modeling Nusselt numbers for thermally developing laminar flow in non-circular ducts. Seventh AIAA/ASME Joint Thermophysics and Heat Transfer Conference 1998.
21. Revellin R., J.R Thome. A new type of diabatic flow pattern map for boiling heat transfer in microchannels. Journal of Micromechanics and Microengineering 2007; 17:788-796.
22. Wojtan L., R. Revellin, J.R. Thome. Investigation of critical heat flux in single, uniformly heated microchannels. Experimental Thermal and Fluid Science 2007; 30:765-774.
23. Chen L., Y.S. Tian, T.G. Karayiannis. The effect of tube diameter on vertical two-phase flow regimes in small tubes. International Journal of Heat and Mass Transfer 2006; 49: 4220-4230.
24. Kew P., K. Cornwall. Correlations for the prediction of boiling heat transfer in small diameter channels. Applied Thermal Engineering 1997; 17: 705-715.
25. Kawaji M., M.Y. Chung. Unique characteristics of adiabatic gas-liquid flows in microchannels: Diameter and shape effects on flow patterns, void fraction and pressure drop. First ASME International Conference on Microchannels and Minichannels 2003.
26. Jacobi A., J.R. Thome. Heat transfer model for evaporation of elongated bubble flows in microchannels. Journal of Heat Transfer 2002; 124:1131-1136.
27. Li J., B. Wang. Size effect on two-phase regime for condensation in micro/mini tubes, Heat Transfer - Asian Research 2003; 32:65-71.
28. McAdams W.H., W.K. Woods, L.C. Heroman. Vaporization inside horizontal tubes II-benzene-oil mixtures. Transactions of ASME 1942; 64:193-200.
29. Cicchitti A., C. Lombaradi, M. Silversti, G. Soldaini, R. Zavattarlli. Two-phase cooling experiments - pressure drop heat transfer burnout measurements. Energia Nucleare 1960; 7:407-425.
30. Dukler A.E., W. Moye, R.G. Cleveland. Frictional pressure drop in two-phase flow. Part A: A comparison of existing correlations for pressure loss and holdup, and part B: An approach through similarity analysis. AIChE Journal 1964; 10:38-51.
31. Awad M.M., Y.S. Muzychka. Effective property models for homogeneous two-phase flows. Experimental Thermal and Fluid Science 2008; 33:106-113.
32. Agostini B., J.R. Thome. Comparison of an extended database of flow boiling heat transfer coefficient in multi-microchannel elements with the three-zone model. ECI International Conference on Heat Transfer and Fluid Flow in Microscale 2005.
33. Kandlikar S.G., P. Balasubramanian. Extending the applicability of the flow boiling correlation at low Reynolds number flows in microchannels. First ASME International Conference on Microchannels and Minichannels 2003.
34. Peters J.V.S., S.G. Kandlikar. Further evaluation of a flow boiling correlation for microchannels and minichannels. Proceedings of the Fifth International Conference on Nanochannels, Microchannels and Minichannels 2007.
35. Qu W., I. Mudawar. Measurement and correlation of critical heat flux in two-phase microchannel heat sinks. International Journal of Heat and Mass Transfer 2004; 47: 2045-2059.
36. Pribyl D.J., A. Bar-Cohen, A.E. Bergles. An investigation of critical heat flux and twophase flow regimes for upward steam and water flow. Proceedings of the Fifth International Conference on Boiling Heat Transfer 2003.
37. Taitel T., A.E. Dukler. A model for flow regime transition in horizontal and near horizontal gas-liquid flows. AIChE Journal 1975; 19:47-55.
38. Agostini B., J.R. Thome, M. Fabbri, B. Michel, D. Calmi, U. Kloter. High heat flux flow boiling in silicon multi-microchannels - Part II: Heat transfer characteristics of refrigerant R245fa. International Journal of Heat and Mass Transfer 2008; 51:5415-5425.
39. Revellin R., J.R Thome. A theoretical model for the prediction of the critical heat flux in heated microchannels. International Journal of Heat and Mass Transfer 2008; 51: 1216-1225.
40. Revellin R., J.M. Quiben, J. Bonjour, J.R Thome. Effect of local hot spots on the maximum dissipation rates during flow boiling in a microchannel. IEEE Transactions on Components and Packaging Technologies 2008; 31:407-416.
41. Breber G., J.W. Palen, J. Taborek. Prediction of horizontal tubeside condensation of pure components using flow regime criteria. Journal of Heat Transfer 1980; 102:471-476.
42. Soliman H.M. Correlation of mist-to-annular transition during condensation. Canadian Journal of Chemical Engineering 1983; 61:178-182.
43. Wang H.S., J.W. Rose. A theory of film condensation in horizontal noncircular section microchannels. Journal of Heat Transfer 2005; 127:1096-1105.
44. Coleman J.W., S. Garimella. Two-phase flow regimes in round, square and rectangular tubes during condensation of refrigerant R134a. International Journal of Refrigeration 2003; 26:117-128.
45. Yang C.-Y., C.-C. Shieh. Flow pattern of air-water and two-phase R-134a in small circular tubes. International Journal of Multiphase Flow 2001; 27:1163-1177.
46. Chen Y.P., P. Cheng. Condensation of steam in silicon microchannels. International Communications in Heat and Mass Transfer 2005; 32:175-183.
47. Bandhauer T.M., A. Agarwal, S. Garimella. Condensation pressure drop in circular microchannels. Heat Transfer Engineering 2005; 26:28-35.
48. Nema G. Flow Regime Transitions during Condensation in Microchannels. The George W. Woodruff School of Mechanical Engineering. Georgia Institute of Technology: Atlanta, 2008.
49. Wang H.S., J.W. Rose. Film condensation in horizontal microchannels: Effect of channel shape. International Journal of Thermal Sciences 2006; 45:1205-1212.
50. Garimella S., J.D. Killion, J.W. Coleman. An experimentally validated model for two-phase pressure drop in the intermittent flow regime for circular microchannels. Journal of Fluids Engineering 2002; 124:205-214.
51. Baird J. R., D.F. Fletcher, B.S. Haynes. Local condensation heat transfer rates in fine passages. International Journal of Heat and Mass Transfer 2003; 46:4453-4466.
52. Moser K.W., R.L.Webb, B. Na. A new equivalent Reynolds number model for condensation in smooth tubes. Journal of Heat Transfer 1998; 120:410-417.
53. Bandhauer T.M., A. Agarwal, S. Garimella. Measurement and modeling of condensation heat transfer coefficients in circular microchannels. Journal of Heat Transfer 2006; 128:1050-1059.
54. Garimella S., A. Agarwal J.D. Killion. Condensation pressure drop in circular microchannels. Heat Transfer Engineering 2005; 26:28-35.
55. Agarwal A. Heat Transfer and Pressure Drop during Condensation of Refrigerants in Microchannels. The George W. Woodruff School of Mechanical Engineering. Georgia Institute of Technology: Atlanta, 2006.
56. Maruyama T., T. Maeuchi. Centrifugal-force driven flow in cylindrical micro-channel. Chemical Engineering Science 2008; 63:153-156.
57. Ducree J., S. Haeberle, T. Brenner, T. Glatzel, R. Zengerle. Patterning of flow and mixing in rotating radial microchannels. Microfluid Nanofluid 2006; 2:97-105.
58. Hao Y.L., Y.-X. Tao. A numerical model for phase-change suspension flow inmicrochannels. Numerical Heat Transfer A 2004; 46:44-77.
59. Xing K.Q., Y.X. Tao, Y.L. Hao. Performance evaluation of liquid flow with PCM particles in microchannels. Journal of Heat Transfer 2005; 127: 931-940.
60. Sabbah R., M.M. Farid, S. Al-Hallaj. Micro-channel heat sink with slurry of water with micro-encapsulated phase change material: 3D-numerical study. Applied Thermal Engineering 2009; 29:445-454.
61. Kuravi S., K. Kota, J. Du, L. Chow. Numerical investigation of flow and heat transfer performance of nano-encapsulated phase change material slurry in microchannels. Journal of Heat Transfer 2009; 131:062901 (1-10).
62. Qu W., I. Mudawar. Experimental and numerical study of pressure drop and heat transfer in a single-phase micro-channel heat sink. International Journal of Heat and Mass Transfer 2002; 45:2549-2565.
63. Sarangi R.K., A. Bhattacharya, R.S. Prasher. Numerical modeling of boiling heat transfer in microchannels. Applied Thermal Engineering 2009; 29:300-309.
64. Ladd A.J.C. Numerical simulation of particulate suspensions via a discretized Boltzmann equation, part I. theoretical foundations. Journal of Fluid Mechanics 1994; 271: 285-309.
65. Ladd A.J.C. Numerical simulation of particulate suspensions via a discretized Boltzmann equation, part II. Numerical results. Journal of Fluid Mechanics 1994; 271:311-339.
66. Chang Q. Lattice Boltzmann Method for Thermal Multiphase Fluid Dynamics. Mechanical and Aerospace Engineering. Case Western Reserve University: Cleveland, 2005.
67. Judy J., D. Maynes, B.W. Webb. Characterization of frictional pressure drop for liquid flows through microchannels. International Journal of Heat and Mass Transfer 2002; 45: 3477-3489.
68. Harms T.M., M.J. Kazmierczak, F.M. Gerner. Developing convective heat transfer in deep rectangular microchannels. International Journal of Heat and Fluid Flow 1999; 20: 149-157.
69. Wu H.Y., P. Cheng. Friction factors in smooth trapezoidal silicon microchannels with different aspect ratios. International Journal of Heat andMass Transfer 2003; 46:2519-2525.
70. Adrian R.J. Particle imaging techniques for experimental fluid mechanics. Annual Review of Fluid Mechanics 1991; 23: 261-304.
71. Santiago J. G., S.T. Wereley, C.D. Meinhart, D.J. Beebe, R.J. Adrian. A particle image velocimetry system for microfluidics. Experiments in Fluids 1998; 25:316-319.
72. Meinhart C.D., S.T. Wereley, J.G. Santiago. PIV measurements of a microchannel flow. Experiments in Fluids 1999; 27:414-419.
73. Meinhart C.D., S.T. Wereley, M.H.B. Gray. Volume illumination for two-dimensional particle image velocimetry. Measurements Science and Technology 2000; 11:809-814.
74. Olsen M.G., R.J. Adrian. Brownian motion and correlation in particle image velocimetry. Optics Laser Technology 2000; 32:621-627.
75. Olsen M.G., R.J. Adrian. Out-of-focus effects on particle image visibility and correlation in microscopic particle image velocimetry. Experiments in Fluids 2000; 29:166-174.
76. Olsen M.G., C.J. Bourdon. Out-of-plane motion effects in microscopic particle image velocimetry. Journal of Fluids Engineering 2003; 125:895-901.
77. Liu D., S.V. Garimella, S.T. Wereley. Infrared micro-particle image velocimetry of fluid flow in silicon-based microdevices. ASME Heat Transfer/Fluids Engineering Summer Conference 2004.
78. Park J.S., C.K. Choi, K.D. Kihm. Optically sliced micro-PIV using confocal laser scanning microscopy (CLSM). Experiments in Fluids 2004; 37:105-119.
79. Mielnik M.M., L.R. Saetran. Improvement of micro-PIV resolution by selective seeding. Proceedings of 4th International Conference on Nanochannels, Microchannels and Minichannels 2006.
80. Tsuei L., O. Savas. Treatment of interfaces in particle image velocimetry. Experiments in Fluids 2000; 29:203-214.
81. Meinhart C.D., S.T. Wereley, J.G. Santiago. A PIV algorithm for estimating time-averaged velocity fields. Journal of Fluids Engineering 2000; 122:285-289.
82. Shah R.K., A.L. London. Laminar Flow Forced Convection in Ducts. Academic Press: New York, 1978.
83. Hohreiter V., S.T. Wereley, M.G. Olsen, J.N. Chung. Cross-correlation analysis for temperature measurement. Measurements Science and Technology 2003; 13:1072-1078.
84. Sakakibara J., K. Hishida M. Maeda. Measurements of thermally stratified pipe flow using image processing techniques. Experiments in Fluids 1993; 16:82-96.
85. Kim H.J., K.D. Kihm, J.S. Allen. Examination of ratiometric laser induced fluorescence thermometry for microscale spatial measurement resolution. International Journal of Heat and Mass Transfer 2003; 46:3967-3974.
86. Sakakibara J., R.J Adrian. Measurement of temperature field of a Rayleigh-Benard convection using two-color laser induced fluorescence. Experiments in Fluids 2004; 37: 331-340.
87. Guasto J.S., P. Huang, K.S. Breuer. Statistical particle tracking velocimetry using molecular and quantum dot tracer particles. Experiments in Fluids 2006; 41:869-880.
88. Guasto J.S., K.S. Breuer. Simultaneous, ensemble-average measurement of near-wall temperature and velocity in steady state micro-flows using single quantum dot tracking. Experiments in Fluids 2008; 45:157-166.
89. Gad-el-Hak M. MEMS Handbook. CRC/Taylor & Francis: Florida, 2006.
90. de Boer M. J., R.W. Tjerkstra, J.W. Berenschot, H.V. Jansen, G.J. Burger, J.G.E Gardeniers, M. Elwenspoek, A. van den Berg. Micromachining of buried micro channels in silicon. Journal of Microelectromechanical Systems 2000; 9:94-103.
91. Jayachandran J. P., H.A. Reed, H. Zhen, L.F. Rhodes, C.L. Henderson, S.A.B. Allen, P.A. Kohl. Air-channel fabrication for microelectromechanical systems via sacrificial photosensitive polycarbonates. Journal of Microelectromechanical Systems 2003; 12:147-159.
92. Papautsky I., J. Brazzle, H. Swerdlow, A.B. Frazier. A low-temperature IC-compatible process for fabricating surface-micromachined metallic microchannels. Journal of Microelectromechanical Systems 1998; 7:267-273.
93. Pijnenburg R. H. W., R. Dekker, C.C.S. Nicole, A. Aubry, E.H.E.C. Eummelen. Integrated micro-channel cooling in silicon. Proceedings of the 34th European Solid-State Device Research Conference 2004.
94. Oprins H., C.C.S. Nicole, J.C. Baret, G. Van der Veken, C. Lasance, M. Baelmans. Onchip liquid cooling with integrated pump technology. Proceedings of 21st Annual IEEE Semiconductor Thermal Measurement and Management Symposium 2005.
95. Chang J.Y., R.S. Prasher, D. Chau, A. Myers, J. Dirner, S. Prstic, D. He. Convective performance of package based single phase microchannel heat exchanger. Proceedings of ASME InterPACK 2005.
96. Kaltsas G., D.N. Pagonis, A.G. Nassiopoulou. Planar CMOS compatible process for the fabrication of buried microchannels in silicon, using porous-silicon technology. Journal of Microelectromechanical Systems 2003; 12:863-872.
97. Dang B., P.J. Joseph, M.S. Bakir, T. Spencer, P. Kohl, J. Meindl. Wafer-level microfluidic cooling interconnects for GSI. Proceedings of IEEE International Interconnect Technology Conference 2005.
98. Dang B., M. Bakir, J. Meindl. Integrated thermal-fluidic I/O interconnects for an on-chip microchannel heat sink. IEEE Electron Device Letters 2006; 27:117-119.
99. Kandlikar S.G., H.R. Upadhye. Extending the heat flux limit with enhanced microchannels in direct single-phase cooling of computer chips. Proceedings of 21st Annual IEEE Semiconductor Thermal Measurement and Management Symposium 2005.
100. Pal A., Y.K. Joshi, M.H. Beitelmal, C.D. Patel, T.M. Wenger. Design and performance evaluation of a compact thermosyphon. IEEE Transaction on Components and Packaging Technologies 2002; 25:601-607.
101. Dang B. Integrated Input/Output Interconnection and Packaging for GSI, Ph.D. Thesis, The School of Electrical and Computer Engineering, Georgia Institute of Technology: Atlanta, 2006.
102. Copeland D., M. Behnia, W. Nakayama.Manifold microchannel heat sinks: Isothermal analysis. IEEE Transactions on Components, Packaging and Manufacturing Technology, Part A 1997; 20:96-102.
103. Kim Y., W. Chun, J. Kim, B. Pak, B. Baek. Forced air cooling by using manifold microchannel heat sinks. Journal ofMechanical Science and Technology 1998; 12:709-718.
104. Xu D., L. Pan. Numerical study of nanofluid flow and heat transfer in microchannels. International Journal of Nanoscience 2006; 5:747-752.
105. Wei X.J, Y.K. Joshi, P.M. Ligrani. Numerical simulation of laminar flow and heat transfer inside a microchannel with one dimpled surface. Journal of Electronic Packaging 2007; 129:63-70.
106. Silva C., E. Marotta, L. Fletcher. Flow structure and enhanced heat transfer in channel flow with dimpled surfaces: Application to heat sinks in microelectronic cooling. Journal of Electronics Packaging 2007; 129:157-166.
107. Silva C., D. Park, E. Marotta, L. Fletcher. Optimization of fin performance in a laminar channel flow through dimpled surfaces. Journal of Heat Transfer 2009; 131:021702(1-9).
108. Sekar D., C. King, B. Dang, T. Spencer, H. Thacker, P. Joseph, M. Bakir, J. Meindl. A 3D-IC technology with integrated microchannel cooling. Proceedings of IEEE International Interconnect Technology Conference 2008.