X-ray photoelectron spectroscopy depth analysis of metal oxides by electrospray droplet impact

Surface and Interface Analysis

Volumn 43, Issue 13, 2011, Pages 1605-1609

  Sakai, Yuji ^a   Ninomiya, Satoshi ^a   Hiraoka, Kenzo ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

damage free ion etching; eectrospray droplet impact (EDI); metal oxides; Ta2O5; TiO2

Indexed keywords

CHEMICAL STATE; DEPTH ANALYSIS; DROPLET IMPACT; ELECTROSPRAY DROPLETS; ETCHING METHOD; INORGANIC AND ORGANIC MATERIALS; ION ETCHING; METAL OXIDES; SELECTIVE SPUTTERING; TIO; TRANSITION-METAL OXIDES; WATER CLUSTER;

CHEMICAL ANALYSIS; CHEMICAL MODIFICATION; DROPS; ETCHING; PHOTOELECTRON SPECTROSCOPY; TANTALUM; TANTALUM OXIDES; TITANIUM DIOXIDE; TRANSITION METALS; X RAY PHOTOELECTRON SPECTROSCOPY;

TRANSITION METAL COMPOUNDS;

EID: 80955166338     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3754     Document Type: Article

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