Shallow surface etching of organic and inorganic compounds by electrospray droplet impact

Applied Surface Science

Volumn 255, Issue 21, 2009, Pages 8947-8952

  Hiraoka, Kenzo ^a   Sakai, Yuji ^b   Iijima, Yoshitoki ^c   Asakawa, Daiki ^a   Mori, Kunihiko ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c JEOL LTD   (Japan)

Author keywords

Cluster ion etching; Electrospray droplet impact; Shallow surface etching

Indexed keywords

DROPS; III-V SEMICONDUCTORS; INDIUM PHOSPHIDE; INORGANIC COMPOUNDS; MASS SPECTROMETRY; PLASTIC BOTTLES; SEMICONDUCTING INDIUM PHOSPHIDE; SILICA; SURFACE ROUGHNESS;

CLUSTER IONS; ELECTROSPRAY DROPLETS; ETCHED SURFACE; ETCHING DEPTH; FRAGMENT IONS; POLYETHYLENE TEREPHTHALATES (PET); STAINLESS STEEL SUBSTRATES; SURFACE ETCHING;

ETCHING;

EID: 67651147935     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.06.101     Document Type: Article

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